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系統識別號 U0026-3008201310411700
論文名稱(中文) 次飛秒脈衝雷射加工系統的開發
論文名稱(英文) Development of Sub-Femtosecond Pulsed Laser Processing System
校院名稱 成功大學
系所名稱(中) 工程科學系碩博士班
系所名稱(英) Department of Engineering Science
學年度 101
學期 2
出版年 102
研究生(中文) 王智弘
研究生(英文) Chin-Hung Wang
學號 N96004426
學位類別 碩士
語文別 中文
論文頁數 45頁
口試委員 指導教授-陳顯禎
口試委員-邱爾德
口試委員-簡汎清
口試委員-易政男
中文關鍵字 次飛秒脈衝雷射  聲光調變器  色散補償  自相關儀 
英文關鍵字 sub-femtosecond pulsed laser  acousto-optic modulator  dispersion compensation  autocorrelator 
學科別分類
中文摘要 本論文試圖發展出一套次飛秒脈衝雷射加工系統搭配稜鏡對與聲光調變器來進行生物組織影像掃描與加工,由於傳統雷射加工系統(即使是奈秒級),熱效應很嚴重,會有融熔殘渣、微裂縫、精細度差等缺點。而飛秒雷射已可將這些問題做明顯的改善,但一般飛秒雷射的脈衝寬度大都在100 fs左右,這樣的脈衝寬度還是會有熱效應的產生。但是若想要使用脈衝寬度100 fs以下來做加工的話,其色散效應是一個非常嚴重的問題。
研究中使用材料為SF-11的稜鏡對來對整體光路系統進行二階色散的補償,主要補償的元件為聲光調變器與物鏡,補償後之系統脈衝寬度為45 fs,並且利用聲光調變器來當作雷射開關與雷射脈衝選擇器去精確地控制雷射強度的脈衝數量,並對不同大小螢光球和雞腱進行雙光子影像與二倍頻影像掃描,最後也使用不同的脈衝寬度在生物組織上進行加工,我們成功地提高影像之空間解析度以及加工效率,降低熱效應的影響。
英文摘要 In this thesis, we want to develop a sub-femtosecond pulsed laser machining system integrated with prism pair and acousto-optic modulator (AOM) for 3D imaging and processing of bio-tissue. Because of conventional laser machining systems (even at nanosecond pulse) have very serious thermal effect. There are many disadvantages such as melting residues, micro-cracks, and poor fineness etc. They can be significantly improved via using femtosecond laser, but generally speaking, the pulse width of femtosecond laser is about 100 fs, there is still has thermal effect in such pulse width level. Dispersion effect will be very severe issue when machining pulse width is below 100 fs.
The SF-11 prism pair was utilized to compensate overall optical system’s second order dispersion. The major compensation components are AOM and objective. After compensating, the system pulse width is 45 fs, and the AOM was utilized to become laser switch and laser pulse selector for precision control the dose of laser intensity. We get the two-photon image from different sizes of fluorescent beads and second harmonic generation image from chicken tendon. Finally, we also use different pulse width on bio-tissue processing. Improving the image spatial resolution, processing efficiency, and reducing thermal effect have been successfully accomplished.
論文目次 摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VI
表目錄 VIII
第一章 緒論 1
1-1 前言 1
1-2文獻回顧 2
1-3 研究動機及目的 3
1-4論文架構 4
第二章 飛秒脈衝雷射 6
2-1 色散效應所引起之雷射脈衝寬度增寬 6
2-2 色散補償 8
2-3 自相關儀 12
2-4飛秒脈衝雷射技術 15
2-4-1影像技術 15
2-4-2加工機制 17
第三章 次飛秒脈衝雷射加工系統 20
3-1系統架構 20
3-1-1鈦藍寶石飛秒雷射寬頻震盪器 21
3-1-2 光路系統 23
3-1-3 定位系統 25
3-2 訊號擷取與控制 27
第四章 實驗結果與討論 32
4-1試片製備 32
4-2脈衝寬度補償 33
4-3雙光子螢光影像與二倍頻影像 35
4-4 生物組織加工 38
第五章 結論 40
參考文獻 42
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