系統識別號 U0026-3007201414383900
論文名稱(中文) 濺鍍陣列式HfO2-TiO2奈米柱光觸媒
論文名稱(英文) Photocatalytic Applications of Nanocomposites of HfO2 - TiO2 Nanorod Arrays Using Sputtering
校院名稱 成功大學
系所名稱(中) 材料科學及工程學系
系所名稱(英) Department of Materials Science and Engineering
學年度 102
學期 2
出版年 103
研究生(中文) 馮皓哲
研究生(英文) Hao-Che Feng
學號 n56014384
學位類別 碩士
語文別 英文
論文頁數 66頁
口試委員 指導教授-張高碩
中文關鍵字 二氧化鉿及二氧化鈦奈米柱  反應性濺鍍法  載子捕捉  光催化及光電化學特性 
英文關鍵字 nanocomposites of HfO2-TiO2 nanorod arrays  reactive sputtering  charge trapping  photocatalysis  photoelectrochemical cell 
中文摘要 這份研究指出高介電材料(二氧化鉿)的最新應用方向,利用其二氧化鉿的缺陷來捕捉載子進而達成光協同作用以利於分解有機汙染物。在實驗過程中,濺鍍陣列式二氧化鉿及二氧化鈦奈米柱來進行研究分析。
英文摘要 This research reports a novel application of high-k material (HfO2) to photocatalysis for the first time by enabling the defects in HfO2 to trap charge carriers to achieve synergistic photo-decomposition of organic pollutants (methylene blue).
A comprehensive investigation into the fabrication of nanocomposites of HfO2-TiO2 nanorod arrays using reactive sputtering was conducted. Well oriented and a maximum separation of approximately 500 nm of HfO2 nanorods were achieved, which enhanced charge carrier transport along the 1D nanoarchitecture. The optimal coupling between HfO2 and TiO2 for photocatalysis was identified as 4 layered HfO2/TiO2 nanorods with thicknesses of 375nm/100nm for each layer. The sample (200 ppm) was found to photodegrade 70 % of a methylene blue solution (5 ppm) in 90 minutes under 30 W UV irradiation.
The synergistic photocatalytic effect was interpreted using the energy band diagrams of the HfO2-TiO2 system and attributed to the circumstance that the photogenerated electrons in TiO2 were trapped in the gap state of VO2+ in HfO2 nanorods, and then pumped into the conduction band of HfO2. The trapping mechanism was further analyzed by performing the measurement of photoluminescence spectroscopy. Another interesting application of the system to a photoelectrochemical reaction was demonstrated as well.
論文目次 摘要.................. I
Abstract ................. II
Content .................IV
Figure Content................VI
Table Content ................VIII
Chap 1 Introduction ...............1
1.1 Motivation ..............1
1.2 Background...............1
1.2.1 Environmental pollution...........1
1.2.2 Solar Energy .............2
1.2.3 Applications of solar energy...........2
1.3 Photocatalyst...............4
1.3.1 Popular photocatalysts............4
1.3.2 Promising structures for photocatalysts .........6
1.4 TiO2 photocatalyst ..............7
1.4.1 Crystal structures and properties of TiO2 .........8
1.4.2 Disadvantages of TiO2 for photocatalysis ........8
1.5 Fabricarion of TiO2.............9
1.5.1 Comparison of fabrication methods .........10
1.5.2 Review of physical vapor deposition (PVD)........11
1.5.3 Nanorod fabrication of sputtering ..........13
1.6 TiO2-based nanocomposites............15
1.7 New Application of Hafnium oxide (HfO2): a photocatalyst .....15
1.7.1 Crystal structure and electrical properties of HfO2 ......15
1.7.2 Defects in HfO2 ............16
1.8 Nanocomposite of HfO2-TiO2 ..........17
1.8.1 Literature review ............17
1.8.2 Synergistic photocatalysis ..........17
1.9 Research objectives ............19
Chap 2 Experiment ..............20
2.1 Experimental materials.............20
2.1.1 Sputtering target .............20
2.1.2 Substrate .............20
2.1.3 Sputtering gas .............20
2.1.4 Annealing gas .............20
2.2 Experimental chemicals............21
2.3 Experimental equipment...........21
2.3.1 Magnetron reactive sputtering..........21
2.3.2 Tube furnace .............23
2.3.3 FIB (Focus ion beam)...........24
2.4 Characterizations ..............24
2.5 Photodegradation..............27
2.6 Photoelectrochemical (PEC) cell..........27
Chap 3 Results and Discussions ............29
3.1 Manufacturing of HfO2 nanorod structures........29
3.1.1 Direct process to make HfO2 nanorods ........29
3.1.2. Indirect process to make HfO2 nanorods .......34
3.2 Structure analysis of HfO2 nanorods: XRD and TEM .......38
3.3 Manufacturing of TiO2 nanorod structure .........40
3.4 Nanocomposite of HfO2 and TiO2 nanorods.........41
3.4.1 TEM analysis of nanocomposite of HfO2-TiO2 nanorods......44
3.5. Photocatalytic properties of nanocomposite of HfO2 -TiO2 nanorods.....46
3.5.1 The effect of different pH values..........46
3.5.2 Photocatalytic properties of different cycles of nanocomposite of HfO2 -TiO2 nanorods. .............47
3.5.3 Further photocatalytic analysis of the 4x nanocomposite of HfO2 -TiO2 nanorods ..............48
3.5.4 The effects of forming gas (90% N2+10% H2) and oxidation....49
3.6 Model of charge trapped effect...........50
3.7 photoelectrochemicalcurrent measurement ........51
3.8 Photoluminescenct (PL) spectroscopy .........53
Chap 4 Conclusions and Future work............55
4.1 HfO2 nanorods made by sputtering ..........55
4.2 Nanocomposites of HfO2-TiO2 nanorod arrays........55
4.3 Characterizations of nanocomposites HfO2-TiO2 nanorod arrays....55
4.4 Synergistic reaction of nanocomposites HfO2-TiO2 nanorod arrays....56
4.5 Performance of the PEC cell of nanocomposites HfO2-TiO2 nanorod arrays..56
4.6 Future work ..............56
References ................58
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