進階搜尋


   電子論文尚未授權公開,紙本請查館藏目錄
(※如查詢不到或館藏狀況顯示「閉架不公開」,表示該本論文不在書庫,無法取用。)
系統識別號 U0026-2910201923210400
論文名稱(中文) 中型動力渦輪分子幫浦之驅動、系統鑑別與最佳控制
論文名稱(英文) Drive, System Identification and Optimal Control for Medium Power Turbomolecular Pumps
校院名稱 成功大學
系所名稱(中) 機械工程學系
系所名稱(英) Department of Mechanical Engineering
學年度 108
學期 1
出版年 108
研究生(中文) 邱信霖
研究生(英文) Hsin-Lin Chiu
學號 N18001224
學位類別 博士
語文別 英文
論文頁數 200頁
口試委員 召集委員-陳元方
指導教授-蔡南全
口試委員-陳鐵城
口試委員-潘敏俊
口試委員-黃運琳
中文關鍵字 渦輪分子幫浦  主動式磁浮軸承  微分型狀態相依最佳調節器  激振抑制策略 
英文關鍵字 Turbo-Molecular Pump (TMP)  Active Magnetic Bearing (AMB)  State Dependent Differential Optimal Regulator (SDDOR)  Resonance-Driven Prevention Strategy (RDPS) 
學科別分類
中文摘要 本研究針對中型動力渦輪分子幫浦(Medium Power Turbo-Molecular Pump, Medium Power TMP),設計與建置一個五自由度轉子/磁浮軸承系統。 由於渦輪分子幫浦能將真空腔室抽至極高真空度(Ultra-high Vacuum Degree)的狀態。 在極高真空度的狀態下,磁浮軸承的散熱能力將會大幅受限。 因此,於設計轉子/磁浮軸承系統的階段,考量了三個因素: (1). 調控磁吸力的響應速度; (2). 磁浮軸承的熱能產生量; (3). 磁浮軸承能輸出最大的磁吸力。 藉由考量這三個因素,所設計出來的磁浮軸承能更適用於渦輪分子幫浦,並且對於外來干擾能有更高的耐受度。 除了設計出適用於中型動力渦輪分子幫浦的轉子/磁浮軸承系統之外,本研究另外設計一組用於驅動磁浮軸承的創新混合式驅動電路,本論文稱之為: 雙模式驅動電路(Dual Cooperative Drive Circuit, DC2)。 顧名思義,雙模式驅動電路具有兩種操作模式: 分別為數位驅動模式(Digital Driving Mode, DDM)與類比驅動模式(Analog Driving Mode, ADM)。 此雙模式驅動電路能即時(Real-time)依負載的動態需求,於數位驅動模式與類比驅動模式間切換。 因此,所提出的雙模式驅動電路兼具高電流動態(High Current Slew Rate)與電流紋波小(Small Current Ripples)等優點。 另外,為了調節轉子偏移量與抑制轉子振動,本研究提出了微分型狀態相依最佳調節器(State Dependent Differential Optimal Regulator, SDDOR)與激振抑制策略(Resonance-Driven Prevention Strategy, RDPS)。 其中,微分型狀態相依最佳調節器(SDDOR)能精確的透過磁浮軸承調控轉子的位置。 相對地,激振抑制策略(RDPS)可以用來抑制轉子轉速經過轉子/磁浮軸承系統的共振頻率中的轉子偏擺幅度。 經模擬成果可以得知,即使轉子/磁浮軸承系統的狀態有變化或有外來的干擾,所設計的激振抑制策略(RDPS)亦能有效抑制轉子共振當下的轉子偏移量。 藉由整合所提出的微分型狀態相依最佳調節器(SDDOR)、激振抑制策略(RDPS)與適用於中型動力渦輪分子幫浦的轉子/磁浮軸承系統,可以: (1). 提供足夠的磁吸力,但有著較少的熱能產生; (2). 提升磁吸力的響應速度; (3). 抑制因轉子上的偏心質量所導致的振動與偏擺,有助於改善傳統渦輪分子幫浦的缺陷。
英文摘要 In this dissertation, a 5-DOF Rotor/Active Magnetic Bearing (Rotor/AMB) unit for Medium Power Turbo-Molecular Pumps (TMPs) is designed and built up. During the design stage, three factors, i.e., (i). the response time in terms of magnetic force, (ii). the temperature rise at coil windings, and (iii). the achievable maximum magnetic force, are all taken into consideration. Therefore, the proposed Rotor/AMB unit is more suitable for vacuum applications and has higher capability to account for undesired disturbances. Besides, a novel compact-design hybrid power amplifier for AMB units, named as Dual Cooperative Drive Circuit (DC2), is proposed and verified by intensive simulations and experiments. DC2 can conduct under any of the two operation modes: Digital Driving Mode (DDM) and Analog Driving Mode (ADM). By taking advantages of complementary cooperation between DDM and ADM, the proposed DC2 manifests its superiorities on both high current slew rate and significantly suppressed current ripples. Most importantly, in order to effectively regulate the position deviations and suppress the undesired vibration of the TMP rotor, the State Dependent Differential Optimal Regulator (SDDOR) and Resonance-Driven Prevention Strategy (RDPS) are synthesized. The proposed State Dependent Differential Optimal Regulator (SDDOR) is able to regulate the radial position deviations of the TMP rotor precisely. The efficacy of the proposed SDDOR has been verified by the corresponding realistic experiments. On the other hand, the Resonance-Driven Prevention Strategy (RDPS) is proposed to ensure the natural frequencies of the Blade Rotor/Radial Active Magnetic Bearing (BR/RAMB) unit are not driven by the rotor speed all the time. Nevertheless, the proposed RDPS can still work very well to comply with the change of the TMP system parameters and undesired disturbance. According to the simulation results, the radial position deviations of BR as the rotational speed of BR is close to the resonance frequencies of BR/RAMB unit are successfully suppressed by the proposed RDPS. By integrating the proposed SDDOR, the proposed RDPS and the proposed design of 5-DOF Rotor/AMB unit for TMPs, the major shortcomings of traditional TMPs are overcome, i.e., (i). to provide sufficient magnetic force with less heat generation, (ii). to shorten the response time in terms of magnetic force, and (iii). to suppress the amplitude of the vibration induced by the unbalance mass of the TMP rotor.
論文目次 摘要 I
Abstract III
誌謝 VI
Table of Contents VIII
List of Tables XI
List of Figures XII
Abbreviations and Acronyms XVIII
Nomenclature XXII

1. Introduction 1
1.1 Comparisons among Ultra-High Vacuum Pumps (UHVPs) 1
1.2 Literature Review of Turbo-Molecular Pumps (TMPs) 3
1.2.1 Design, Modeling and Analysis of TMP Blade Rotor 5
1.2.2 Design, Modeling and Analysis of Motor and Active Magnetic Bearings (AMBs) 10
1.2.3 Potential Factors Causing Collision between Rotor and Stator of a TMP 11
1.2.4 Pumping Performances of TMP 16
1.2.5 Novel Designs of TMPs 17
1.3 Research Motivations and Objectives 19
1.4 Organization of Dissertation 22

2. Design of 5-DOF Rotor/Active Magnetic Bearing (Rotor/AMB) Unit for Medium Power Turbo-Molecular Pumps (TMPs) 29
2.1 Modal Analysis of TMP Blade Rotor 30
2.2 Design of 5-DOF Rotor/AMB Unit 32
2.2.1 Design of Radial Active Magnetic Bearing (RAMB) 34
2.2.2 Design of Axial Active Magnetic Bearing (AAMB) 38
2.2.3 5-DOF Rotor/Active Magnetic Bearing (Rotor/AMB) Unit 41
2.3 Mathematical Model of 5-DOF Rotor/AMB Unit 42

3. System Identification of 5-DOF Rotor/AMB Unit 63
3.1 System Identification on Commercial Controller Embedded in TMP 64
3.2 Experimental Setup for Identification of Rotor/RAMB Dynamic Model 78
3.2.1 Design of Summer Module 79
3.2.2 Parallel Amplitude-modulated Pseudo-Random Binary Sequence (PAPRBS) Generator 79
3.2.3 Construction of Input Signals Applied to Plant 83
3.3 System Identification of Rotor/RAMB Dynamics 84

4. Dual Cooperative Drive Circuit (DC2) for Active Magnetic Bearings 114
4.1 Design of Dual Cooperative Drive Circuit (DC2) 116
4.1.1 Digital Drive Mode (DDM) 116
4.1.2 Analog Drive Mode (ADM) 117
4.2 Pulse Width Modulation-Tuning Processors (PWM-TPs) 118
4.2.1 PWM-TP for DDM 119
4.2.2 PWM-TP for ADM 119
4.3 Simulations 120
4.4 Experiments 123

5. Design of Controllers for Levitation and Vibration Suppression of TMP Rotor by AMBs 137
5.1 State Dependent Differential Optimal Regulator (SDDOR) 137
5.2 Experimental Setup and Results 146
5.3 Rotor Speed Control Strategy to Avoid Resonance Frequencies of TMP 150
5.3.1 Dynamic Interaction between Blade Rotor and Radial Active Magnetic Bearing 151
5.3.2 Resonance-Driven Prevent Strategy Based on Gap Measurements 156
5.4 Resonance-Driven Prevention Strategy (RDPS) 160

6. Conclusions and Future Works 181
6.1 Conclusions 181
6.2 Contributions 182
6.3 Future Works 185

References 187
參考文獻 Amoli, A., Ebrahimi, R., & Hosseinalipour, S. M., “Some Features of Molecular Flow in a Rotor-stator Row with Real Topology,” Vacuum, Vol. 72, pp. 427–438, 2004.

ANSYS, ANSYS Mechanical APDL Rotordynamic Analysis Guide, Canonsburg: ANSYS, Inc, 2013.

Angeli, M. D., Gervasini, G., & Gittini, G., “Design and Test of a Magnetic Shield for Turbomolecular Pumps,” Journal of Vacuum Science & Technology A, Vol. 25, pp. 1475–1479, 2007.

Antoniouc, A. G., Panos, C. N., & Valamontes, E. S., “The Turbomolecular Pump in Molecular State,” Vacuum, Vol. 46, No. 7, pp. 709–715, 1995.

Bai, J., Maoa, Z., & Pub, T., “Recursive Identification for Multi-input-multi-output Hammerstein-Wiener System,” International Journal of Control, Vol. 92, No. 6, pp. 1457–1469, 2019.

Bartha, A. R., “Dry Friction Backward Whirl of Rotors,” PhD Thesis, Swiss Federal Institute of Technology of Zurich, Zurich, 2000.

Becker, W., “The Turbomolecular Pump, its Design, Operation and Theory; Calculation of the Pumping Speed for Various Gases and Their Dependence on the Forepump,” Vacuum, Vol. 16, No. 11, pp. 625–632, 1966.

Bird, G. A., “Effect of Inlet Guide Vanes and Sharp Blades on the Performance of a Turbomolecular Pump,” Journal of Vacuum Science & Technology A, Vol. 29, p. 011016, 2011.

Biswas, S., Chattopadhyay, M., & Pal, R., “Magnetic Shield for Turbomolecular Pump of the Magnetized Plasma Linear Experimental Device at Saha Institute of Nuclear Physics,” Review of Scientific Instruments, Vol. 82, p. 013506, 2011.

Cao, G. & Lee, C.-W., “Development of PWM Power Amplifier for Active Magnetic Bearings,” Fifth World Congress on Intelligent Control and Automation, Hangzhou, China, 15-19 June 2004, pp. 3475–3478.

Carabelli, S., Maddaleno, F., & Muzzarelli, M., “High-efficiency Linear Power Amplifier for Active Magnetic Bearings,” IEEE Transactions on Industrial Electronics, Vol. 47, No. 1, pp. 17–24, 2000.

Cerruti, F., Delprete, C., Genta, G., & Carabelli, S., “High Efficiency and Low Cost Power Amplifiers and Transducers for Active Magnetic Bearings,” Fourth International Symposium on Magnetic Bearings, Zurich, Switzerland, 23-26 Aug. 1994, pp. 365–370.

Chen, R., Li, H.-W., & Tian, J., “The Relationship between the Number of Magnetic Poles and the Bearing Capacity of Radial Magnetic Bearing,” 2017 Chinese Automation Congress (CAC), Jinan, China, 20-22 Oct. 2017, pp. 5553–5557.

Chang1, Y.-W. & Jou, R.-Y., “Analytic Expressions of the Speed Factor for Turbomolecular Pumps,” Journal of Vacuum Science & Technology A, Vol. 19, pp. 2900–2904, 2001.

Chang2, Y.-W. & Jou, R.-Y., “Direct Simulation of Pumping Characteristics in a Fully 3D Model of a Single-stage Turbomolecular Pump,” Applied Surface Science, Vol. 169-170, pp. 772-776, 2001.

Chatelet, E., D'Ambrosio, F., & Jacquet-Richardet, G., “Toward Global Modelling Approaches for Dynamic Analyses of Rotating Assemblies of Turbomachines,” Journal of Sound and Vibration, Vol. 282, pp. 163–178, 2005.

Chew, A., Brewster, B., Olsen, I., & Ormrod, S., “Improvements in the Performance of Turbomolecular Pumps,” Vakuum in Forschung und Praxis, Vol. 23, No. 3, pp. 14–18, 2011.

Chiang, H.-W., Kuan, C.-P., & Li, H.-L., “Turbomolecular Pump Rotor-bearing System Analysis and Testing,” Journal of Vacuum Science & Technology A, Vol. 27, No. 5, pp. 1196–1203, 2009.

Chiu, H.-L. & Tsai, N.-C., “Rotor Speed Control Strategy to Avoid Resonance Frequencies of Turbo-molecular Pump,” Transactions of the Institute of Measurement and Control, Vol. 40, No. 15, pp. 4273–4284, 2018.

Chu, J.-G. & Hua, Z.-Y., “The Statistical Theory of Turbomolecular Pumps,” Journal of Vacuum Science & Technology, Vol. 20, No. 4, pp. 1101–1104, 1982.

Çimen, T., “Systematic and Effective Design of Nonlinear Feedback Controllers via the State-Dependent Ricatti Equation (SDRE) Method,” Annual Reviews in Control, Vol. 34, No. 1, pp. 32–51, 2010.

Cloutier, J. R., D’Souza, C. N., & Mracek, C. P., “Nonlinear Regulation and Nonlinear H∞ Control via the State-dependent Riccati Equation Technique; Part 1- Theory; Part 2- Examples,” Proc. of the International Conf. on Nonlinear Problems in Aviation and Aerospace, Daytona Beach, FL, USA, pp. 117–141, 1996.

DC Permeability of 35H250, 2016, Yung-Chin Silicon Steel Co., Ltd. http://cutcore.com.tw/eng/images/p3/d2/5/2.pdf

Ding, F. & Chen, T., “Identification of Hammerstein Nonlinear ARMAX Systems,” Automatica, Vol. 41, No. 9, pp. 1479–1489, 2005.

Edwards Vacuum, www.edwardsvacuum.com

Gatzen, H. H., Saile, V., & Leuthold, J., “Vacuum Technology,” Micro and Nano Fabrication, pp. 7–63, 2015.

Giors, S., Colombo, E., Inzoli, F., Subba, F., & Zanino, R., “Computational Fluid Dynamic Model of a Tapered Holweck Vacuum Pump Operating in the Viscous and Transition Regimes. I. Vacuum Performance,” Journal of Vacuum Science & Technology A, Vol. 24, pp. 1584–1591, 2006.

Giors, S., Campagna, L., & Emelli, E., “New Spiral Molecular Drag Stage Design for High Compression Ratio, Compact Turbomolecular-drag Pumps,” Journal of Vacuum Science & Technology A, Vol. 28, No. 4, pp. 931–936, 2010.

Golub, G. H. & Van Loan, C. F., Matrix Computations. (3rd ed.), Baltimore and London: The Johns Hipkins University Press, 1996.

Habermann, H., Brunet, M., & Joly, P., “Device for Damping the Critical Frequencies of a Rotor Suspended by a Radial Electromagnetic Bearing,” US Patent 4128795, 1978.

Hablanian, M. H., “Engineering Aspects of Turbomolecular Pump Design,” Vacuum, Vol. 82 pp. 61–65, 2008.

Haessig, D. & Friedland, B., “State Dependent Differential Riccati Equation for Nonlinear Estimation and Control,” In Proc. of the 15th IFAC Triennial World Congress, Vol. C, pp. 405–410, 2002.

Han, B.-C., Huang, Z.-Y., & Le, Y., “Design Aspects of a Large Scale Turbomolecular Pump with Active Magnetic Bearings,” Vacuum, Vol. 142, pp. 96–105, 2017.

Heo1, J.-S. & Hwang, Y.-K., “Molecular Transition and Slip Flows in the Pumping Channels of Drag Pumps,” Journal of Vacuum Science & Technology A, Vol. 18, No. 3, pp. 1025–1034, 2000.

Heo2, J.-S. & Hwang, Y.-K., “DSMC Calculations of Blade Rows of a Turbomolecular Pump in the Molecular and Transition Flow Regions,” Vacuum, Vol. 56, pp. 133–142, 2000.

Herzog, R., Buhler, P., Gahler, C., & Larsonneur, R., “Unbalance Compensation using Generalized Notch Filters in the Multivariable Feedback of Magnetic Bearings,” IEEE Transactions on Control Systems Technology, Vol. 4, No. 5, pp. 580–586, 1996.

Heydari, A. & Balakrishnan, S. N., “Path Planning using a Novel Finite Horizon Suboptimal Controller,” Journal of Guidance, Control, and Dynamics, Vol. 36, No. 4, pp. 1210–1214, 2013.

Hoffman, D. M., Singh, B., & Thomas, J. H., “Handbook of Vacuum Science and Technology,” Boston: Academic Press, 1997.

Hosseinalipour, S. M., Amoli, A., & Ebrahimi, R., “Direct Simulation of Free Molecular Flow in Fully Three-Dimensional Axial Rotor,” Journal of Thermophysics and Heat Transfer, Vol. 18, No. 1, pp. 148–151, 2004.

Hsieh, F.-C., Lin, P.-H., Liu, D.-R., & Chen, F.-Z., “Pumping Performance Analysis on Turbomolecular Pump,” Vacuum, Vol. 86, pp. 830–832, 2012.

Hsu, C.-N., “Experimental and Performance Analyses of a Turbomolecular Pump Rotor System,” Vacuum, Vol. 121, pp. 260–273, 2015.

Huang, Z.-Y., Han, B.-C., Mao, K., Peng, C., & Fang, J.-C., “Mechanical Stress and Thermal Aspects of the Rotor Assembly for Turbomolecular Pumps,” Vacuum, Vol. 129, pp. 55–62, 2016.

Huang, Z.-Y., Han, B.-C., & Le, Y., “Modeling Method of the Modal Analysis for Turbomolecular Pump Rotor Blades,” Vacuum, Vol. 144, pp. 145–151, 2017.

Hucknall, D. J. & Goetz, D. G., “Turbomolecular Pumps,” Vacuum, Vol. 37, No. 8, pp. 615–620, 1987.

Ino, K., Sekine, K., Shibata, T., Ohmi, T., & Maejima, Y., “Improvement of Turbomolecular Pumps for Ultraclean, Low-pressure, and High-gas-flow Processing,” Journal of Vacuum Science & Technology A, Vol. 16, No. 4, pp. 2703–2710, 1998.

Iqbal, M., Wasy, A., Batani, D., Rashid, H., & Lodhi, M. A. K., “Design Modification in Rotor Blade of Turbomolecular Pump,” Nuclear Instruments and Methods in Physics Research A, Vol. 678, pp. 88–90, 2012.

Jahromi, A. F., Bhat, R. B., & Xie, W.-F., “Forward and Backward Whirling of a Rotor with Gyroscopic Effect,” Mechanisms and Machine Science, Vol. 23, pp. 879–887, 2015.

Janczak, A., “Instrumental Variables Approach to Identification of a Class of MIMO Wiener Systems,” Nonlinear Dynamics, Vol. 48, No. 3, pp. 275–284, 2007.

Jie, C. “Analysis and Research of Displacement Sensor for Active Magnetic Bearings System,” Instrument Technique and Sensor, Vol. 12, pp. 1–3, 2001.

Jin, Q., Ruan, X.-B., Ren, X.-Y., & Xi, H., “High-efficiency Switch-linear-hybrid Envelope-tracking Power Supply with Step-wave Approach,” IEEE Transactions on Industrial Electronics, Vol. 62, No. 9, pp. 5411–5421, 2015.

Jin, Q., Ruan, X.-B., Ren, X.-Y., Wang, Y.-Z., Len, Y., & Tse, C. K., “Series-parallel-form Switch-linear Hybrid Envelope-tracking Power Supply to Achieve High Efficiency,” IEEE Transactions on Industrial Electronics, Vol. 64, No. 1, pp. 244–252, 2017.

Kashiwagi, S., “A High-efficiency Audio Power Amplifier using a Self-oscillating Switching Regulator,” IEEE Transactions on Industry Applications, Vol. IA-21, No. 4, pp. 906–911, 1985.

Korayem, M. H. & Nekoo, S. R., “State-dependent Differential Riccati Equation to Track Control of Time-varying Systems with State and Control Nonlinearities,” ISA Transations, Vol. 57, pp. 117–135, 2015.

Li1, Y.-W., Chen, X.-K., Jia, Y.-H., Liu, M.-Z., & Wang, Z., “Numerical Investigation of Three Turbomolecular Pump Models in the Free Molecular Flow Range,” Vacuum, Vol. 101, pp. 337–344, 2014.

Li2, Y.-W., Chen, X.-K., Guo, W.-J., Li, D.-M., Wang, Q.-F., & Feng, K., “Accurate Simulation of Turbomolecular Pumps with Modified Algorithm by 3D Direct Simulation Monte Carlo Method,” Vacuum, Vol. 109, pp. 354–359, 2014.

Lin, C.-C. & Tsai, N.-C., “Air-gap Detection Circuit using Equivalent Capacitive Changes for Inductive Micromotor,” IEEE Sensors Journal, Vol. 15, No. 3, pp. 1611–1623, 2015.

Liu, G. & Mao, K., “Investigation of the Rotor Temperature of a Turbo-molecular Pump with Different Motor Drive Methods,” Vacuum, Vol. 146, pp. 252–258, 2017.

Liu, Y. & Ding, F., “Convergence Properties of the Least Squares Estimation Algorithm for Multivariable Systems,” Applied Mathematical Modelling, Vol. 37, No. 1, pp. 476–483, 2013.

Liu, Z.-H., Nonami, K., & Arga, Y., “Adaptive Unbalanced Vibration Control of Magnetic Bearing Systems with Rotational Synchronizing and Asynchronizing Harmonic Disturbance,” JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing, Vol. 45, No. 1, pp. 142–149, 2002.

Luo, X., Day, C., Hauer, V., Malyshev, O. B., Reid, R. J., & Sharipov, F., “Monte Carlo Simulation of Gas Flow Through the KATRIN DPS2-F Differential Pumping System,” Vacuum, Vol. 80, pp. 864–869, 2006.

Malyshev, O. B., “Characterisation of a Turbo-molecular Pumps by a Minimum of Parameters,” Vacuum, Vol. 81, pp. 752–758, 2007.

Mao, K. & Liu, G., “An Improved Braking Control Method for the Magnetically Levitated TMP with a Fast Transient Response,” Vacuum, Vol. 148, pp. 312–318, 2018.

Matsushita, O., Yoneyama, M., Takahashi, N., Fukushima, Y., Hiroshima, M., Kaneki, T., Abe, Y., & Sakanashi, N., “Method and Apparatus for Controlling a Magnetic Bearing,” European Patent EP0560234A2, 1993.

McLyman, C. W. T., “Transformer and Inductor Design Handbook,” Third Edition, CRC Press, 2004.

Mizuno, T., Bleuler, H., Tanaka, H., Hashimoto, H., Harashima, F., & Ueyama, H., “Industrial Application of Position Sensorless Active Magnetic Bearings,” Electrical Engineering in Japan, Vol. 117, No. 5, pp. 124–133, 1996.

Mokler, P. H., “Concept of a New Turbomolecular Pump with Central Opening for Free Axial Access–The Ring Turbomolecular Pump,” Vacuum, Vol. 82, pp. 408–411, 2008.

Nakamura, T., Wakui, S., & Nakamura, Y., “A Phase Stabilization Method for Unbalance Vibration Control of Five-axes Active Magnetic Bearing Systems,” AIM 2014-IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besançon, France, 8–11 July, 2014, pp. 150-155.

National Instruments, Nyquist and Shannon's Sampling Theorems, 2018, http://zone.ni.com/reference/en-XX/help/370524V-01/siggenhelp/fund_nyquist_and_shannon_theorems/

National Instruments, Anti-Aliasing Filters and Their Usage Explained, 2019, http://www.ni.com/zh-tw/innovations/white-papers/18/anti-aliasing-filters-and-their-usage-explained.html

Naris, S., Tantos, C., & Valougeorgis, D., “Kinetic Modeling of a Tapered Holweck Pump,” Vacuum, Vol. 109, pp. 341–348, 2014.

Okubo, S., Nakamura, Y., & Wakui, S., “Unbalance Vibration Control for Active Magnetic Bearing using Automatic Balancing System and Peak-of-gain Control,” 2013 IEEE International Conference on Mechatronics, Vicenza, Italy, Feb. 27–Mar. 1, 2013, pp. 105-110.

Ooshima, M., Chiba, A., Fukao, T., & Rahman, M. A., “Design and Analysis of Permanent Magnet-type Bearingless Motors,” IEEE Transactions on Industrial Electronics, Vol. 43, No. 2, pp. 292–299, 1996.

Pearson, J. D., “Approximation Methods in Optimal Control: I. Sub-optimal Control,” Journal of Electronics and Control, Vol. 13, No. 5, pp. 453–469, 1962.

Practical Electron Microscopy and Database, http://www.globalsino.com/EM/

Ren, Y. & Fang, J., “Current-sensing Resistor Design to Include Current Derivative in PWM H-bridge Unipolar Switching Power Amplifiers for Magnetic Bearings,” IEEE Transactions on Industrial Electronics, Vol. 59, No. 12, pp. 4590–4600, 2012.

Ren, X.-J., Le, Y., & Han, B.-C., “System Electromagnetic Loss Analysis and Temperature Field Estimate of a Magnetically Suspended Motor,” Progress in Electromagnetics Research M, Vol. 55, pp. 51-61, 2017.

Saito, D. & Wakui, S., “Trial of Applying the Unbalance Vibration Compensator to Axial Position of the Rotor with AMB,” Proceeding of the 2017 International Conference on Advanced Mechatronic System, Xiamen, China, 6–9 Dec., 2017, pp. 249-254.

Schneider, T. N., Katsimichas, S., Oliveira, C. R. E., & Goddard, A. J. H., “Empirical and Numerical Calculations in Two Dimensions for Predicting the Performance of a Single Stage Turbomolecular Pump,” Journal of Vacuum Science & Technology A, Vol. 16, pp. 175–180, 1998.

Schulz, A., Wassermann, J., & Schneeberger, M., “A Reliable Switching Amplifier for Active Magnetic Bearings,” IEEE International Conference on Industrial Technology, Maribor, Slovenia, 10-12 December 2003, pp. 198–202.

Schweitzer, G. & Maslen, E. H., “Magnetic Bearings: Theory, Design, and Application to Rotating Machinery,” Springer Science & Business Media, 2009.

Sengil, N., “Performance Increase in Turbomolecular Pumps with Curved Type Blades,” Vacuum, Vol. 86, pp. 1764–1769, 2012.

Sengil, N. & Edis, O. F., “Fast Cell Determination of the DSMC Molecules in Multi-stage Turbo Molecular Pump Design,” Computers & Fluids, Vol. 45, pp. 202–206, 2011.

Sharipov, F., “Numerical Simulation of Turbomolecular Pump Over a Wide Range of Gas Rarefaction,” Journal of Vacuum Science & Technology A, Vol. 28, No. 6, pp. 1312–1315, 2010.

Shi, L.-Q., Wang, X.-Z., Zhu, Y., & Pang, S.-J., “Design of Disk Molecular Pumps for Hybrid Molecular Pumps,” Journal of Vacuum Science & Technology A, Vol. 11, No. 2, pp. 426–431, 1993.

Silva, G. S., Beltrame, R. C., Schuch, L., & Rech, C., “Hybrid AC Power Source Based on Modular Multilevel Converter and Linear Amplifier,” IEEE Transactions on Power Electronics, Vol. 30, No. 1, pp. 216–226, 2015.

Sivrioglu, S. & Nonami, K., “Sliding Mode Control with Time-Varying Hyperplane for AMB Systems,” IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 1, pp. 51–59, 1998.

Spagnol, M., Cerruti, R., & Helmer, J., “Turbomolecular Pump Design for High Pressure Operation,” Journal of Vacuum Science & Technology A, Vol. 16, No. 3, pp. 1151–1156, 1998.

Sugai, T., Inoue, T., & Ishida, Y., “Nonlinear Theoretical Analysis of Contacting Forward Whirling Vibration of a Rotating Shaft Supported by a Repulsive Magnetic Bearing,” Journal of Sound and Vibration, Vol. 332, No. 11, pp. 2735–2749, 2013.

Tsai, N.-C., Chiang, C.-W., & Li, H.-Y., “Innovative Active Magnetic Bearing Design to Reduce Cost and Energy Consumption,” Electromagnetic, Vol. 29, No. 6, pp. 406–420, 2009.

Tsai, N.-C., Kuo, C.-H., & Lee, R.-M., “Regulation on Radial Position Deviation for Vertical AMB Systems,” Mechanical Systems and Signal Processing, Vol. 21, No. 7, pp. 2777–2793, 2007.

Tsai, N.-C. & Lee, R.-M., “Regulation of Spindle Position by Magnetic Actuator Array,” The International Journal of Advanced Manufacturing Technology, Vol. 53, No. 1-4, pp. 93–104, 2011.

Vacuum-guide.com, https://www.vacuum-guide.com/english/equipment/hw-turbomolecular.htm

Vacuum Science World, https://www.vacuumscienceworld.com/blog/working-with-turbomulecular-vacuum-pumps

Valamontes, E. S., Panos, C. N., Antoniouc, A. G., & Valamontes, S. E., “The Helicoid Multi-groove Molecular and the Turbomolecular Vacuum Pumps in Molecular State under the Scope of Statistical Behavior of Molecules,” Vacuum, Vol. 47, No. 11, pp. 1361–1370, 1996.

Versluis, R., Dorsman, R., Thielen, L., & Roos, M. E., “Numerical Investigation of Turbomolecular Pumps using the Direct Simulation Monte Carlo Method with Moving Surfaces,” Journal of Vacuum Science & Technology A, Vol. 27, No.3, pp. 543–547, 2009.

Vilkko, M. & Roinila, T., “Designing Maximum Length Sequence Signal for Frequency Response Measurement of Switched Mode Converters,” Proceedings of the Nordic Workshop on Power and Industrial Electronics (NORPIE/2008), Espoo, Finland, Jun. 9-11, 2008, pp. 1–6.

Vuojolainen, J., Nevaranta, N., Jastrzebski, R., & Pyrhonen, O., “Comparison of Excitation Signals in Active Magnetic Bearing System Identification,” Modeling, Identification and Control, Vol. 38, No. 1, pp. 1–11, 2017.

Wang, J., Wang, L., Dong, J., & Huang, C., “Research on the Steady State and Ripple Current Models of Current Mode Switching Power Amplifier for Magnetic Bearing,” Journal of Software Engineering, Vol. 9, No. 1, pp. 157–168, 2015.

Wang, S., Ninokata, H., Merzari, E., Lei, K., Luo, X.-L., Lu, L.-Y., & Kase, K., “Numerical Study of a Single Blade Row in Turbomolecular Pump,” Vacuum, Vol. 83, pp. 1106–1117, 2009.

Wang, Y.-Z., Jin, Q., & Ruan, X.-B., “Optimized Design of the Multilevel Converter in Series-form Switch-linear Hybrid Envelope-tracking Power Supply,” IEEE Transactions on Industrial Electronics, Vol. 63, No. 9, pp. 5451–5460, 2016.

Wolf, J., Bornschein, B., Drexlin, G., Gehring, R., Größle, R., Horn, S., Kernert, N., Riegel, S., Neeb, R., & Wagner, A., “Investigation of Turbo-molecular Pumps in Strong Magnetic Fields,” Vacuum, Vol. 86, pp. 361–369, 2011.

Yoshida, T., Kuroba, Y., Ohniwa, K., & Osamu, M., “Self-sensing Active Magnetic Bearings using a New PWM Amplifier Equipped with a Bias Voltage Source,” European Power Electronics and Drives, Vol. 15, No. 2, pp. 19–24, 2005.

Zhang, J. & Karrer, N., “IGBT Power Amplifiers for Active Magnetic Bearings of High Speed Milling Spindles,” 21st International Conference on Industrial Electronics, Control, and Instrumentation, Orlando, FL, USA, 6-10 Nov. 1995, pp. 596–601.

Zhu, C. & Mao, Z., “A PWM Based Switching Power Amplifier for Active Magnetic Bearings,” Eighth International Conference on Electrical Machines and Systems, Nanjing, China, 27-29 Sep. 2005, pp. 1563–1568.
論文全文使用權限
  • 同意授權校內瀏覽/列印電子全文服務,於2022-09-01起公開。
  • 同意授權校外瀏覽/列印電子全文服務,於2023-09-01起公開。


  • 如您有疑問,請聯絡圖書館
    聯絡電話:(06)2757575#65773
    聯絡E-mail:etds@email.ncku.edu.tw