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系統識別號 U0026-2908201118432000
論文名稱(中文) 雙自由度積層式超音波馬達之設計與實現
論文名稱(英文) Design and Implementation of Two-DOF Multi-layer Ultrasonic Motor
校院名稱 成功大學
系所名稱(中) 機械工程學系專班
系所名稱(英) Department of Mechanical Engineering (on the job class)
學年度 99
學期 2
出版年 100
研究生(中文) 李肇平
研究生(英文) Chao-Ping Lee
電子信箱 ryanlee@sunnytec.com.tw
學號 N1793107
學位類別 碩士
語文別 中文
論文頁數 56頁
口試委員 指導教授-蔡明祺
口試委員-陳國聲
口試委員-田思齊
口試委員-蔡孟勳
中文關鍵字 超音波馬達  壓電致動器  雙壓電晶片致動器  雙自由度  積層式  低電壓驅動 
英文關鍵字 ultrasonic motor  piezoelectric actuator  bimorph actuator  two degree-of-freedom  multi-layer  low driving voltage 
學科別分類
中文摘要 智慧型手機等可攜式產品在近年來蓬勃的發展,這為可應用於可攜式產品的元件,提供了廣大的商機。超音波馬達由於結構適於微型化、低噪音以及在小型化時的效率較其他致動器為高,因此極適合應用於可攜式產品。
本研究利用雙壓電晶片振動子結構設計超音波馬達,經由適當的電極及結構設計,使之具備二個自由度的運動方向。分別對基本單層型以及積層式壓電振動子超音波馬達進行了性能量測後,在400V/mm電場強度下,基本單層型雙壓電晶片超音波馬達振動子之驅動電壓為120V,最大推力3.0765N,最大速度87.75mm/s,最大效率為4.201%。而積層式雙壓電晶片超音波馬達振動子的驅動電壓則為24V,最大推力2.5782N,最大速度74.23mm/s,最大效率為11.633%。結果顯示積層式振動子有潛力應用於可攜式產品。
英文摘要 The portable devices like smart phone had been developed vigorously in these years. It provides a huge opportunity for those components which can be applied for portable devices. Due to its compact size, low noise and high efficiency in miniature structure, ultrasonic motor shows its advantage for portable devices application.
An ultrasonic motor using bimorph piezoelectric actuator had been developed in this research. There are two degree-of –freedoms movement can be operated through suitable electrode and structure design. The performance had been measured for single layer bimorph actuator and multi-layer bimorph actuator, respectively. Under 400V/mm electric field, the single layer bimorph actuator drove at 120V, maximum trust 3.0765N, maximum free velocity 87.75mm/s and maximum efficiency 4.201%. At the same electric field condition, the multi-layer bimorph actuator drove at 24V and showed maximum trust 2.5782N, maximum free velocity 74.23mm/s and maximum efficiency 11.633%. The result showed the potential of multi-layer bimorph type ultrasonic motor which can be applied for portable devices.
論文目次 中文摘要 I
英文摘要 II
誌謝 III
目錄 IV
表目錄 VI
圖目錄 VII
第一章 緒論 1
1.1 前言 1
1.2 研究動機 2
1.3 文獻回顧 2
1.3.1 壓電馬達 2
1.3.2 超音波馬達 4
1.3.3 低電壓驅動超音波馬達 7
1.3.4 多自由度超音波馬達 10
1.4 研究目的 14
1.5 本文架構 14
第二章 超音波馬達振動子設計與製作 16
2.1 壓電振動子設計 16
2.1.1 基本雙壓電晶片振動子結構 16
2.1.2 積層式雙壓電晶片振動子結構 17
2.1.3 振動子尺寸設計 19
2.2 有限元素法模擬 20
2.3 積層式壓電陶瓷製程及壓電振動子製作 24
2.4 壓電振動子量測 28
2.4.1 基本型雙壓電晶片振動子的量測結果 28
2.4.2 積層式雙壓電晶片振動子的量測結果 29
2.4.3 結果討論 31
第三章 實驗結果與討論 33
3.1 實驗設備與架構 33
3.1.1 實驗儀器 33
3.1.2 實驗設備架構 34
3.2 基本型雙壓電晶片超音波馬達性能量測 37
3.2.1 預壓力與驅動電壓分析 37
3.2.2 輸出功率與效率分析 41
3.3 積層式雙壓電晶片振動子超音波馬達性能量測 43
3.3.1 預壓力與驅動電壓分析 43
3.3.2 輸出功率與效率分析 45
3.4 基本型與積層式雙壓電晶片超音波馬達的比較分析 47
3.5 實作成品 49
第四章 結論及建議 51
參考文獻 53
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