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系統識別號 U0026-2708201901532000
論文名稱(中文) SiO2/TiO2奈米複合粉體之製備及濕度感測性質之研究
論文名稱(英文) Preparation and humidity sensing properties of SiO2/TiO2 nanocomposites by sol-gel method
校院名稱 成功大學
系所名稱(中) 材料科學及工程學系
系所名稱(英) Department of Materials Science and Engineering
學年度 107
學期 2
出版年 108
研究生(中文) 陳映蓉
研究生(英文) Ying-Rung Chen
學號 N56061519
學位類別 碩士
語文別 中文
論文頁數 86頁
口試委員 指導教授-黃啟祥
口試委員-劉全璞
口試委員-張高碩
口試委員-徐邦昱
中文關鍵字 溶膠凝膠法  二氧化矽  二氧化鈦  濕度感測 
英文關鍵字 SiO2  TiO2  sol-gel method  humidity sensing 
學科別分類
中文摘要 本研究以溶膠凝膠法製備SiO2/TiO2奈米複合粉體,實驗中以四乙氧基矽烷(TEOS)及異丙醇鈦(TTIP)做為原料,並在反應中添加檸檬酸增加合成粉體之親水性,藉由調控起始原料Si與Ti之比例以及添加不同含量之氯化鉀,探討合成粉體之化學結構、表面形貌、親疏水性、濕度感測等性質。實驗結果顯示以溶膠凝膠法可成功合成出SiO2/TiO2奈米複合粉體,且製程快速僅需數小時,不同Si/Ti比之粉體其主要成分皆為非晶相之SiO2且仍含有檸檬酸,經紅外線光譜分析後,粉體內含有Si-O-Ti之鍵結,顯示本研究之製程有成功使Ti進入到SiO2中,可增加材料之缺陷以提升濕度感測之性質。又,檸檬酸在吸附水分子的過程可以提供質子在水層中進行傳遞,增加材料之導電性以降低其阻抗值。各試樣之粒徑皆約為50~100 nm,且經水接觸角之測試後,顯示適量Ti的添加可增進粉體的親水性。
在濕度感測性質方面,結果顯示Si/Ti = 1.0 + 5 mole% KCl之試樣在相對濕度11%~95% RH的環境下具有最佳的靈敏性及線性關係,其阻抗值變化可達4個數量級,反應及回復時間分別為34秒及23秒。此外,此試樣之遲滯現象小,最大的遲滯誤差僅約3.8 %,且在高低濕度來回反覆測試下以及進行長時間之測試下,其阻抗值並無出現很大的差異,皆呈現良好的重複性及穩定性。
英文摘要 In this study, SiO2/TiO2 nanocomposites were prepared by a faster process and without calcination. The powders were synthesized by sol-gel method, and citric acid was added in the reaction to increase the hydrophilicity of the powders. The particle size was controlled by adjusting the stirring time and pH value, and the particle size was about 50-100 nm. Different amounts of KCl were added to the reaction, and the effects of different KCl contents on humidity sensing properties were investigated. The results showed that the sample synthesized with 5 mole% KCl at the ratio of Si/Ti = 1.0 had the best sensitivity and linearity in the relative humidity range of 11%-95% RH. The impedance value could be changed up to 4 orders of magnitude. The response and recovery time of this sample were 34 s and 23 s, respectively. It also exhibited small hysteresis and good stability. Thus, the SiO2/TiO2 nanocomposite could be successfully synthesized by sol-gel method and it was a promising material for the application of humidity sensor.
論文目次 中文摘要 I
英文延伸摘要 II
誌謝 X
目錄 XIV
表目錄 XVII
圖目錄 XVIII
第1章 緒論 1
1-1 前言 1
1-2 研究動機、目標及策略 3
第2章 基礎理論與文獻回顧 4
2-1 濕度感測器之要件 4
2-2 濕度感測器之種類 5
2-2-1 電阻式濕度感測器 6
2-2-2 電容式濕度感測器 8
2-2-3 重量式濕度感測器 10
2-2-4 光學式濕度感測器 11
2-3 電阻式濕度感測器之感測機制 17
2-4 SiO2及TiO2複合材料之製備及應用 21
2-4-1 SiO2及TiO2的基本性質 21
2-4-2 SiO2及TiO2複合材料之製備方式 21
2-4-3 SiO2及TiO2之相關應用 23
2-5 濕度感測器相關研究動態 26
2-5-1 SiO2電阻式濕度感測器之相關研究 26
2-5-2 TiO2電阻式濕度感測器之相關研究 30
2-5-3 添加鹼金屬鹽類之濕度感測器 34
第3章 實驗方法與步驟 47
3-1 實驗用藥品及原料 47
3-2 實驗流程 48
3-3 材料性質之分析 50
3-3-1 相鑑定分析 50
3-3-2 化學結構分析 50
3-3-3 顯微結構分析 50
3-3-4 元素分析 51
3-4 濕度感測性質之分析 51
3-4-1 濕度感測器之製作 51
3-4-2 濕度感測性質之量測 53
第4章 結果與討論 55
4-1 粉末分析 55
4-1-1 粉末之相鑑定分析 55
4-1-2 粉末之化學鍵結分析 55
4-1-3 粉末之表面形貌及元素分析 56
4-1-4 粉末親疏水性分析 57
4-2 粉末之濕度感測性質分析 63
4-2-1 工作頻率對於阻抗值之影響 63
4-2-2 濕度感測阻抗值變化 64
4-2-3 反應及回復時間 64
4-2-4 遲滯現象 65
4-2-5 重複性及穩定性之測試 66
4-2-6 濕度感測機制之探討 66
第5章 結論 76
參考文獻 77
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