系統識別號 U0026-2708201416035600
論文名稱(中文) 電容式壓力感測器應用於尿流速量測與研製
論文名稱(英文) Implementation of Capacitive Pressure Sensor for Uroflowmetry Measurement
校院名稱 成功大學
系所名稱(中) 電機工程學系
系所名稱(英) Department of Electrical Engineering
學年度 102
學期 2
出版年 103
研究生(中文) 陳虹如
研究生(英文) Hong-Ru Chen
學號 n26010203
學位類別 碩士
語文別 中文
論文頁數 59頁
口試委員 指導教授-羅錦興
中文關鍵字 電容式壓力感測器  文氏管  微機電製程技術 
英文關鍵字 Micro Electro Mechanical Systems (MEMS)  capacitive pressure sensor  uroflowmetry. 
中文摘要 在腎臟檢查的眾多項目中,尿液流量量測在很多項目都有包含,尿流量的多寡並不與疾病直接掛上等號,而是藉由尿流量來計算成份的含量或是其變化評估腎臟的健康狀況。
本文的感測器製作嘗試各種不同的製程做法,利用微機電製程技術,成功做出一套符合電容式壓力感測器的製程流程,並克服險峻表面(高低差達33 μm)難以圖案定義的困難。做出的感測器電容值在進行慢流速注水測試後電容改變量達到36 pF,對於液體流動具有靈敏度,但對於流速的分辨上仍有很大的改進空間。
英文摘要 Since kidney disease usually has no symptoms until it is at a serious stage; therefore, uroflow test would be a basic indication for various kinds of kidney checkup. Although the amount of uroflow test is not equally to kidney diseases, it is an indication for us to evaluate kidney health status by measuring either the content or the flow rate of urine.
This study makes efforts to manufacture urinary flow meter to measure uroflowmetry on urine collection bags. The uroflow is calculated by using the relation between urine flow rate and the flow channel diameter. And the test is completed on urine collection bags. Combining with other medical test for kidney, this is a disease test to evaluate kidney function.
Our objective is to make this uroflow test compact and comfortable; meaning that patients could apply test by themselves at home rather than in hospital. Capacitive pressure sensor measures film strain, which is related with the flow rates and converted to capacitance changing. In this study, urine flow meter is based on Venturi tube as the sensor structure. Venturi tube sensor structure is featuring to separate urine from sensors to avoid accidentally current leakage. For hygiene aspect, PDMS is a kind of low cost disposable material. Micro Electro Mechanical Systems (MEMS) technology is applied for compact consideration.
The capacitive area is 6 mm x 2 mm and the size of square via array in the sensing area is 100 μm x 100 μm. The width of the channel connecting two capacitors’ spaces is 50 μm. Negative PR is adopted and coated on a steep surface with 33 μm gap difference. The flow meter could determine whether liquid flow passing through or not, but it has low resolution at low flow rate.
論文目次 摘要 I
Abstract II
誌謝 XII
表目錄 XV
圖目錄 XVI
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 1
1.2.1 腎臟與尿液 1
1.2.2 流量計的分類與應用 4
1.2.3 流體力學簡介 7
1.3 研究動機與目的 9
第二章 研究方法 10
2.1 感測器設計 10
2.1.1 單電容感測器 11
2.1.2 大尺寸雙電容感測器 15
2.1.3 MEMS製小尺寸雙電容感測器 20
2.2 量測儀器與環境 30
2.2.1 阻抗量測儀 30
2.2.2 注射幫浦 31
2.2.3 量測系統 32
第三章 結果與討論 33
3.1 單電容感測器 33
3.1.1 製作結果 33
3.1.2 量測結果與分析 33
3.1.3 量測結果探討 34
3.2 大尺寸雙電容感測器 34
3.2.1 製作結果 34
3.2.2 量測結果與分析 38
3.2.3 量測結果探討 38
3.3 MEMS製小尺寸雙電容感測器 39
3.3.1 製作結果 39
3.3.2 量測結果與分析 47
3.3.3 量測結果探討 50
3.4 製程上的實務經驗與探討 52
3.4.1 旋轉塗佈 52
3.4.2 曝光與顯影 53
3.4.3 硬烤 53
3.4.4 金屬電極鍍膜 53
3.4.5 黃光製程探討-險峻表面定義圖案 54
第四章 結論與未來展望 57
4.1 結論 57
4.2 未來展望 57
參考文獻 58
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