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系統識別號 U0026-2608201516484700
論文名稱(中文) 適用於AVM系統之信心指標異常分析機制
論文名稱(英文) Reliance-Index Alarm Analysis Scheme for the AVM System
校院名稱 成功大學
系所名稱(中) 製造資訊與系統研究所
系所名稱(英) Institue of Manufacturing Information and Systems
學年度 103
學期 2
出版年 104
研究生(中文) 龔芸
研究生(英文) Yun Kung
學號 P96021110
學位類別 碩士
語文別 中文
論文頁數 47頁
口試委員 指導教授-鄭芳田
口試委員-洪敏雄
口試委員-楊浩青
口試委員-李家岩
口試委員-陳朝鈞
中文關鍵字 虛擬量測  全自動虛擬量測系統  信心水準  信心指標  信賴區間 
英文關鍵字 Virtual metrology  reliance level  reliance index (RI)  degree of similarity  manufacturability 
學科別分類
中文摘要 無論半導體、面板、太陽能等科技產業,生產效率與產品品質為顧客滿意之重要指標;當生產流程已被精實化,而難以精進時,產品之品質檢驗即扮演重要角色。為達到上述目的,最好的檢驗方式為全檢,即能夠獲得每一件產品的品質資訊,但因龐大的檢驗成本和無法滿足產品交期,而滯礙難行。有鑑於此,虛擬量測 (Virtual Metrology, VM)技術便發展用於解決上述問題,在不增加抽測樣本的條件下,利用生產機台的製程參數 (Process data)納入推估模型架構進行產品品質之推估,並達到線上且即時之品質監控。全自動虛擬量測 (Automatic Virtual Metrology, AVM)系統主要可分成三大部分,包含資料前處理,預測模型以及監控機制。監控機制又包含了製程參數相似度指標 (Similarity Index, SI)以及預測信心指標 (Reliance Index, RI)。然而目前AVM系統中信心指標發生異常時,表示預測值信心度不足,但未能提供問題發生之根本原因。因此,本論文將提出一精進信心指標機制異常分析方法,於信心指標發生異常時,解析AVM系統中之預測模型,即時判斷及辨識發生異常之製程參數,並通知設備工程師進行機台檢查,以確保整體製程品質與維護AVM系統預測精度。
英文摘要 Production efficiency and product quality are the most important features of customer satisfaction for all high-technology industries. For this reason, commodity inspection plays a significant role. “Virtual Metrology (VM)” concept is derived in order to meet the requirement of commodity inspection, and our research team has developed the automatic virtual metrology (AVM) system for various VM applications since 2007. VM makes conjecturing workpiece quality based on process data collected from production equipment with a slight supplement of actual metrology data feasible for semiconductor manufacturing.
AVM system consists of three modules, including data pre-process, conjecture and monitor scheme modules. Monitor scheme contains data quality index (DQI_X), similarity index (SIs), and reliance index (RI). Although many researches worked on the evaluation of prediction results such as confidence interval, confidence value, reliance value, and so on, few of these works aimed to find the reasons why the reliance index is under the threshold. This paper proposes a novel method to identify and determine the primary cause of an RI alarm in a virtual metrology system (VMS). The results will be sent to users and equipment engineers for them to adjust and check the equipment so as to resolve VMS manufacturability issues and ensure the production quality.
The illustrative examples involving semiconductor foundry are presented. Experimental results demonstrate that the proposed method is applicable to the VMS of production equipment (such as semiconductor and TFT-LCD).
論文目次 中文摘要 III
英文摘要 IV
誌 謝 IX
圖目錄 XII
表目錄 XIII
第壹章 緒論 1
1.1 研究背景 1
1.2 研究動機與目的 4
1.3 研究流程 6
1.4 論文架構 7
第貳章 文獻探討與理論基礎 8
2.1 文獻探討 8
2.1.1 推估值信心度 8
2.1.2 虛擬量測系統之信心指標 9
2.2 理論基礎 10
2.2.1 偏最小平方法 10
2.2.2 倒傳遞類神經網路 11
2.2.3 變異數分析中的F檢定 12
第參章 研究方法 14
3.1 信心指標異常分析機制 14
3.2 信心指標異常分析機制流程說明 14
3.2.1 PLS預測模型解析方法 15
3.2.2 NN預測模型解析方法 16
3.2.3 信心指標異常分析機制流程說明 19
3.3 信心指標異常分析機制範例說明 22
第肆章 實現與驗證信心指標異常分析機制 30
4.1 以電漿增強式化學氣相沉積 (PECVD)之成對(量測片)資料為例 30
4.2 以薄膜電晶體液晶顯示 (TFT-LCD)製程當中的感光型柱狀間隙物高度 (Photo-spacer Height)量測項目之成對 (量測片)資料為例 37
第伍章 結論 44
參考文獻 45
參考文獻 [1] 2003 International Technology Roadmap for Semiconductors (ITRS), Dec. 2003. http://public.itrs.net/
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