||Development of a Novel Piezoelectric Vibrator and its Applications on Ultrasonic Motor Design
||Department of Mechanical Engineering
active linear guide
Recent developments in motor design have been directed towards miniaturization, multiDOF and low-noise operation in response to the market demand. Conventional electromagnetic motors are limited by the working principle that creates difficulties in reducing their size and maintaining their performance at the same time. Ultrasonic motors, on the other hand, have benefits that can address these problems, such as quick response, high torque at low speeds and quiet operation, making them suitable for applications such as robot joints, positioning stages, medical devices and micro-assembly systems etc.
This dissertation presents a novel structure of piezoelectric vibrator for the design application of ultrasonic motors. The main feature of the vibrator is to adopt perpendicular electrodes for which asymmetrical and non-uniform electric fields are developed in the vibrator and a special vibration mode can be generated to push the rotor/slider. Experimental results show that the novel vibrator design has higher power density than other vibrators and can be easily installed to rotary, linear, planar and spherical ultrasonic motors because of its compact size and simple structure. Moreover, the novel vibrator can be driven with a single-phase voltage so that the design of driving circuit can be simplified significantly. The performance of ultrasonic motors can be further improved using a multiphase drive.
摘 要 III
誌 謝 V
目 錄 VI
表 目 錄 VIII
圖 目 錄 IX
第一章 緒 論 1
1.1 研究動機與目的 1
1.2 文獻回顧 6
1.3 論文架構 18
第二章 超音波馬達振動子設計 19
2.1 多相驅動振動子 19
2.2 單相驅動振動子 26
第三章 非對稱電場驅動之壓電振動子設計 30
3.1 振動子結構與致動原理 30
3.2 振動子尺寸分析 36
3.3 振動子表面振幅量測 43
第四章 線型超音波馬達 48
4.1 線型超音波馬達結構 48
4.2 馬達性能量測系統 50
4.3 實驗結果 54
第五章 各種超音波馬達應用 62
5.1 主動式線性滑軌 62
5.2 旋轉超音波馬達 67
5.3 平面與球面超音波馬達 73
第六章 結論與建議 79
6.1 結論 79
6.2 未來研究建議 81
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