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系統識別號 U0026-2607201111244800
論文名稱(中文) 微天秤型鏡面結構於雙顯示投影系統之研製
論文名稱(英文) A Novel Dual Screen Projection System Using Balance-type Micromirror with Piezoelectric Actuator
校院名稱 成功大學
系所名稱(中) 系統及船舶機電工程學系
系所名稱(英) Department of Systems and Naval Mechatronic Engineering
學年度 99
學期 2
出版年 100
研究生(中文) 施明廷
研究生(英文) Ming-Ting Shih
學號 p16981071
學位類別 碩士
語文別 中文
論文頁數 102頁
口試委員 口試委員-黃明志
口試委員-張祥傑
口試委員-李大青
指導教授-沈聖智
中文關鍵字 LIGA-like  壓電致動器  微鏡面  雙投影光學系統 
英文關鍵字 LIGA-like  Piezoelectric actuator  Micro-mirror  Dual screen projection system 
學科別分類
中文摘要 本文係設計一創新雙掃描光學模組以實現雙投影顯示技術,並解決
目前微型投影機僅能投影單一小畫面之問題。雙掃描光學模組是以
LIGA-like 製程完成的雙掃描鏡面結構,包含天秤型的雙掃描微鏡面、具
偏心結構的慢軸機構與薄型壓電致動器。天秤型雙微掃描結構係將兩個
微鏡面以Y 字樑連接並搭配薄型壓電致動器,使雙微鏡面做同步連動形
成近似天秤運動行為,以實現同步顯示兩個影像畫面之功能。另外,Y
字樑設計將可提高扭轉頻率與鏡面支撐強度;在慢軸的偏心結構部分,
是以不對稱的重量觀念來使微鏡面產生鐘擺動作以增加掃描角度。由實
驗結果證實,當施加電壓30Vpp 時,慢、快軸的機械半角度及共振頻率分
別為1.9°、3.75kHz 與9.6°、11.7kHz。若雙投影光學系統搭配電壓分別
為10Vpp 與30Vpp,以快軸與慢軸兩模態同時驅動,可同時投影雙矩形、
雙圓形與雙里沙育等畫面。本論文設計一研製雙微掃描光學模組實現同
步雙投影顯示功能。因此,此系統未來可廣泛的應用於行動投影裝置。
英文摘要 This paper presents an innovative dual scan optics module (DSOM) to solve the problem of existing micro-projectors only being able to project a single small picture. Therefore, this study designed a balanced double
micro-mirrors synchronous scanning mechanism using LIGA-like technology for dual screen projection. The DSOM was composed of balance-type dual micro-mirrors as fast axis, an eccentric slow axis mechanism, and slender piezoelectric actuators. For the balance-type dual projection structure, two micro-mirrors are connected using a Y-shape beam, so that both micro-mirrors can synchronous scanning form motion behaviors approximate to a balance. The experiments demonstrated when a voltage of 30Vpp was applied, the
scanning angle of the slow axis and the fast axis were respectively 1.9° and 9.6°, and their driving frequencies were respectively 3.7kHz and 11.45kHz.The DSOM were applied a voltage of 10Vpp matched with a 30Vppand integrated the fast axis mold and slow axis mold, so as to simultaneously
project dual rectangular and dual Lissajous pictures. The study achieves the function of a synchronous display of two images. Therefore, this DSOM is well suited for application to portable projection equipment in the future.
論文目次 摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
表目錄 VI
第一章 緒論 1
1.1前言 1
1-2研究動機 6
1.3研究方法與論文架構 7
第二章 文獻回顧 9
第三章 元件設計與模擬 20
3-1 雙微掃描鏡面元件設計 20
3-2 元件理論分析 22
3-2-1 元件設計方法 22
3-2-2 偏心結構 23
3-2-3 Y字型扭轉軸 24
3-3 元件模擬分析 28
3-3-1 偏心結構模擬分析 30
3-3-2 Y字型扭轉軸模擬 31
3-3-3 元件模態與角度模擬分析 33
3-4 壓電介紹 38
3-4-1 壓電效應 38
3-4-2 壓電元件之種類 39
3-4-3 雙層式壓電致動器 40
第四章 元件製程設計與整合 44
4-1 LIGA-like製程介紹 44
4-1-1 LIGA-like製程 44
4-1-2 微電鑄製程 46
4-2微掃描鏡製程設計 50
4-2-1濺鍍金屬靶材 51
4-2-2雙微掃描鏡面製程 52
4-2-3剝離(lift-off)製程 56
4-3微掃描光學模組之建構 58
第五章 量測與實驗結果 60
5-1元件量測 60
5-1-1元件靜態量測 60
5-1-2元件動態量測 65
5-2 投影方法建立 76
5-2-1 圖形投影編碼 76
5-2-2 圖形投影實驗 77
5-3可靠性測試 80
5-4 量測結果討論 82
5-4-1電鑄製程之誤差討論 82
5-4-2量測與模擬之比較 86
第六章 結論與未來工作 93
6-1 結論 93
6-2未來工作 94
參考文獻 95
附錄一 鎳(Ni)材料係數 100
附錄二 PZT-4材料係數 101
作者自述 102
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