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系統識別號 U0026-2308201123314500
論文名稱(中文) 氣浮支架流道研究
論文名稱(英文) Study on the Flow Behaviors of Flotation Bracket
校院名稱 成功大學
系所名稱(中) 機械工程學系專班
系所名稱(英) Department of Mechanical Engineering (on the job class)
學年度 99
學期 2
出版年 100
研究生(中文) 楊正安
研究生(英文) Cheng-An Yang
學號 N1796111
學位類別 碩士
語文別 中文
論文頁數 148頁
口試委員 指導教授-陳鐵城
口試委員-林震銘
口試委員-李旺龍
中文關鍵字 氣浮支架  氣浮孔  紊流理論  噴流原理  氣靜壓軸承  承載力 
英文關鍵字 flotation bracket  air hole  turbulence theory  jet theory  aerostatic bearing  bearing capacity 
學科別分類
中文摘要 本文使用流場模擬軟體ANSYS CFX探討精密設備業常使用於傳輸、定位、支撐各種尺寸工作物的氣浮支架流道設計。氣浮支架可在較小的承載面支撐工作物,且可因應不同工作物尺寸設計成自動移位。玻璃或其他材質的基板進行製程或檢測時,須嚴格避免變形、應力、振動、碰撞、污染、刮傷等狀況產生,因此氣浮支架普遍應用於自動化、製程及檢測等設備上。本文以流體力學中的紊流、噴流及氣靜壓軸承理論探討流場現象,並以文獻結論驗證模擬可靠性。根據設備的測試條件、氣浮支架幾何尺寸及氣浮高度作為模擬的條件,並以同一參數條件探討無工作物及有工作物於氣浮支架上的速度、壓力分佈、速度向量及流線場的現象;再比較入口速度及氣浮孔徑、間距、間隙對壓力、速度的影響,進而求得對承載力、耗氣量及氣浮均勻度的影響。其承載力及耗氣量的趨勢與氣靜壓軸承文獻一致,可作為後續氣浮支架流道研究的基礎。
英文摘要 In this thesis, a simulation software ANSYS-CFX is employed to investigate the behaviors of flotation brackets that are frequently adopted to transport, position, and support the workpiece in many equipments without the negative effects of deformation, stress concentration, vibration, and collision. In this work, theory of turbulent flow, jet flow, and aerostatic bearing in fluid dynamics is used to study the behavior of flotation bracket and the accuracy of numerical results is demonstrated by comparing with the data in the literature. The distributions of velocity and pressure of fluid under the conditions of specific size and the flotation height with or without the loading of workpiece can be evaluated numerically. Moreover, the effects of hole size, distance between holes, and gap on the pressure and velocity of fluid are calculated and discussed.
論文目次 摘要 I
Abstract II
誌謝 III
目錄 V
表目錄 VIII
圖目錄 IX
符號說明 XVI
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 4
1-3 研究動機與目的 7
1-4 全文架構 11
第二章 氣浮平台介紹 12
2-1 氣體軸承的種類 12
2-2 氣體軸承的特色 15
2-3 多孔質氣浮平台介紹 18
第三章 理論基礎及模擬軟體介紹 26
3-1 CFD基礎理論 26
3-2 CFX軟體概述 31
3-3 CFX分析流程 36
3-4 基礎紊流及噴流原理介紹 38
第四章 分析流程說明 45
4-1 模型設計說明 45
4-2 模型參數定義 52
4-3 網格化說明 55
4-4 邊界條件設定 63
4-5 求解控制設定 72
第五章 模擬結果與討論 82
5-1 CFX模擬驗證案例 82
5-2 入口速度Vin=35m/s,無工作物於氣浮支架上的分析結果 92
5-3 入口速度Vin =35m/s,有工作物於氣浮支架上的分析結果 112
5-4 各模型流場特性比較 132
第六章 結論 141
6-1 結論 141
參考文獻 144
自述 148
參考文獻 [1]E. Salem and M. Shawky, “An experimental investigation into the performance of externally pressurized rectangular air bearings,” Wear, Vol. 50, No. 2, pp. 237-257, 1977.
[2]D. A. Boffey, et al., “An experimental investigation of the effect of orifice restrictor size on the stiffness of an industrial air lubricated thrust bearing,” Tribology International, Vol. 14, No. 5, pp. 287-291, 1981.
[3]S. Z. Kassab, et al., “Effects of operating conditions and supply hole diameter on the performance of a rectangular aerostatic bearing,” Tribology International, Vol. 30, No. 7, pp. 533-545, 1997.
[4]A. J. Devitt, “Chairman and Chief TechNo. logy Officer of New Way Air Bearings, "Porous vs. Orifice Air Bearing TechNo. logy,” pp. 1-15, 1999.
[5]Y. Li, et al. “Influences of the geometrical parameters of aerostatic thrust bearing,” Tribology International, Vol. 40, No. 7, pp. 1120-1126, 2007.
[6]N. Bhat, et al., “Design and test of a Pareto optimal flat pad aerostatic bearing,” Tribology International, Vol. 41, No. 3, pp. 181-188, 2008.
[7]李柏勳, “非接觸式多孔氣浮平台參數設計之研究”, 大葉大學工業工程與科技管理學系碩士論文, 2009.
[8]張堯閔, “非接觸式大型玻璃搬送系統之設計與分析”, 台灣科技大學機械工程學系碩士論文, 2005.
[9]王鴻林、陳明志、曾健明, “大型玻璃基材檢測氣浮平台設計與實測”, 中國機械工程學會第二十二屆全國學術研討會, D8-007, 2005.
[10]C. C. Chiu, “Influences of Geometric Design Parameters and Operational Conditions Variations on the Performance and Stability of a High-speed Gas Spindle System,” Department of Mechanical Engineering, Yuan-Ze University, 2009.
[11]陳畊谷, “平面顯示器玻璃基板主動式氣浮平台之設計與控制研究”, 臺灣大學工程科學及海洋工程學系碩士論文, 2009.
[12]林雨夔, “氣靜壓平面軸承之參數最佳化設計分析”, 成功大學機械工程學系碩士論文, 2009.
[13]R. Adin Director of R&D, Display Division, Orbotech LTD., Yavne, Israel, Y. Yassour Co-founder & CTO, CoreFlow LTD, Yokneam, Israel, “Contactless LCD Fab: From TechNo. logy to Implementation,” SID Symposium Digest of Technical Papers, Vol. 35, No. 1, pp. 1492-1495, 2004.
[14]New Way, http://www.newwayairbearings.com/
[15]New Way Air Bearings, “Air Bearing Application and Design Guide,” Revision E , 2006.
[16]ANSYS CFX-Solver Theory Guide. ANSYS release 12.1, 2009.
[17]ANSYS CFX Introduction. ANSYS release 12.1, 2009.
[18]ANSYS CFX Tutorials. ANSYS release 12.1, 2009.
[19]ANSYS, http://www.ansys.com/products/fluid-dynamics/cfx/
[20]黃美嬌, “基礎紊流”, 臺灣大學機械工程學系講義, 1997.
[21]詹勝雄, “矩形空間內移動LCD面板受垂直噴氣之動態流場研究”, 臺灣科技大學機械工程學系碩士論文, 2006.
[22]M. Miyatake, et al., “Numerical investigation of static and dynamic characteristics of aerostatic thrust bearings with small feed holes,” Tribology International, Vol. 43, No. 3, pp. 1353-1359, 2010.
[23]R. W. Fox, et al., “Introduction to Fluid Mechanics, 6 Edition,” Wiley, John & Sons, Incorporated.
[24]Festo, http://www.festo.com/
[25]Westwind Air Bearings, www.westwind-airbearings.com
[26]WESTWIND GSI Group, Inc., WESTWIND PCB Spindles, 2008.
[27]Hsin Yang TechNo. logy Corp, www.zs-handling.com
[28]Y. S. Chen, et al., “Investigating the influence of geometric parameters on the gas bearing static stiffness with the experimental and numerical methods,” Journal of Chinese Institute of Engineers, Vol. 32, No. 4, pp. 489-500, 2009.
[29]X. D. Chen, et al., “ The effect of the recess shape on performance analysisof the gas-lubricated bearing in optical lithography,” Tribology International, Vol. 39, No. 3, pp. 1336-1341, 2006.
[30]Y. Li, et al., “Influences of the Geometrical Parameters of Aerostatic Thrust Bearing with Pocketed Orifice-type Restrictor on its Performance,” Tribology International, Vol. 40, No. 7, pp. 1120-1126, 2007.
[31]楊加風, “氣體軸承節流孔口之氣體質流量CFD分析與實驗研究”, 雲林科技大學機械工程系碩士論文, 2004.
[32]唐永新, “顯示器科技特色發展計畫”, 台灣科技大學光機電技術研發中心, 2005.
[33]S. Yoshimoto, et al.,“Static and Dynamic Characteristics of Aerostatic Circular Porous Thrust Bearings (Effect of the shape of the air supply area),” Tribology International, Vol. 123, pp. 501-508, 2001.
[34]http://www.airbearing.de/begin_en.htm
[35]陳育斌, “精密氣靜壓平台設計與分析研討會講義”, 精密機械研發中心, 2009.
[36]黃韋倫等, “氣靜壓導軌設計分析”, 中興大學工具機系統設計課程講義, 2011.
[37]陳明飛等, “精密工具機氣靜壓導軌設計分析”, 中興大學工具機系統設計課程講義, 2010.
[38]池長青, “氣體動靜壓軸承的動力學及熱力學”, 北京航空航天大學出版社, 2008.
[39]馬鐵猶, “計算流體動力學”, 北京航空學院出版社, 1986.
[40]J. W. Powell, “Design of Aerostatic Bearing”, Machinery Publishing Co. Ltd., 1970.
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