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系統識別號 U0026-2111201212482000
論文名稱(中文) 奈米銀/鈦酸鍶複合薄膜之光催化特性研究
論文名稱(英文) Study on photocatalytic properties of nano-Ag/SrTiO3 composite
校院名稱 成功大學
系所名稱(中) 地球科學系碩博士班
系所名稱(英) Department of Earth Sciences
學年度 101
學期 1
出版年 101
研究生(中文) 蔡俊吉
研究生(英文) Chun-Chi Tsai
學號 L46971100
學位類別 碩士
語文別 中文
論文頁數 88頁
口試委員 指導教授-陳燕華
口試委員-齊孝定
口試委員-鄧茂華
中文關鍵字 鈦酸鍶薄膜  奈米銀  射頻磁控濺鍍  光催化 
英文關鍵字 SrTiO3 thin film  Ag-nanoparticle  RF magnetron sputtering  photocatalysis 
學科別分類
中文摘要 本研究利用射頻磁控濺鍍系統於矽基板上沉積鈦酸鍶(SrTiO3)薄膜與奈米銀/鈦酸鍶複合薄膜。複合薄膜包含Ag (25nm) / SrTiO3、Ag (20nm) / SrTiO3、Ag (22nm) / SrTiO3、Ag film / SrTiO3等4個樣品;複合薄膜中所含之銀含量多寡依序為Ag (25nm) / SrTiO3< Ag (20nm) / SrTiO3< Ag (22nm) / SrTiO3< Ag film / SrTiO3 (由SEM可得知)。由X光繞射儀分析得知製備出的鈦酸鍶薄膜是屬於立方晶系結構,複合薄膜內之SrTiO3亦皆屬於立方晶系。當複合薄膜中的銀粒子增加,SrTiO3的(110)晶面會往低角度偏移,且Ag (22nm) / SrTiO3與Ag film / SrTiO3複合薄膜中之銀為離子狀態的Ag+,此結果會造成鈦酸鍶晶格之扭曲變形。由光學曲率量測得知,隨著銀含量的增加其薄膜應力也隨著增加,此結果與XRD圖譜中(110)晶面之偏移趨勢相呼應。固態紫外光-可見光光譜數據指出:加入銀可使薄膜之能階變小,但複合薄膜間之能隙相差不大。光催化的結果證實:鈦酸鍶薄膜具有不錯的光分解亞甲基藍染劑之效果,複合薄膜之光催化效果則欠佳。複合薄膜光催化效率不彰的原因可能是因為銀奈米粒子並沒有達到最適當的比例,造成電荷轉移上之困難或不能有效分離電子電洞對;或因為樣品中之銀離子進入SrTiO3之晶格中造成內部之晶格缺陷,使得可參與光催化反應之電子數量變少,故光催化效率下降。
英文摘要 In this study, SrTiO3 and nano-Ag/SrTiO3 thin films are deposited on Si substrates by RF magnetron sputtering system. The composite thin films include Ag(25nm)/SrTiO3, Ag(20nm)/SrTiO3, Ag(22nm)/SrTiO3, and Ag film/SrTiO3. The amount of Ag nanoparticles in the SrTiO3 film is Ag(25nm)/SrTiO3<Ag(20nm)/SrTiO3<Ag(22nm)/SrTiO3<Ag film/SrTiO3 (from SEM observation). X-ray diffraction analysis shows the SrTiO3 film has a cubic crystalline structure, so do the composite thin films. However, the (110) diffraction peak shifts toward lower angles with the increasing amount of Ag nanoparticles. Moreover, the XPS results show that Ag+ existed in the SrTiO3 lattice for samples of Ag(22nm)/SrTiO3 and Ag film/SrTiO3. This phenomenon will cause lattice distortion and induce stress in the film, which is corresponding to the XRD results. The information of UV-visible spectroscopy indicates the band gap becomes smaller with adding nanoparticles in the SrTiO3 film, but the band gap is nearly the same for all the composite films. The photocatalytic result shows that SrTiO3 thin film has a good photocatalytic decomposition for methylene blue, however, it is a little bad for composite films. The reason of worse photocatalytic efficiency for composite films may be an inappropriate density distribution of Ag nanoparticles. This would be difficult for charge transfer, or electron-hole pairs can not be separated effectively during photocatalytic process. One more reason may be due to the lattice defect which is resulted from Ag+ ions entering the SrTiO3 structure. This would make the defects become trap-centers to capture electrons. And then a decrease of electron numbers will be occurred for photocatalytic reaction, therefore, the photocatalytic efficiency becomes worse.
論文目次 中文摘要............................I
Abstract..........................II
致謝...............................III
目錄...............................IV
圖目錄..............................VIII
表目錄..............................XI
1 第一章 緒論 1
1.1 前言 1
1.2 實驗目的 2
2 第二章 文獻回顧 6
2.1 材料簡介 6
2.1.1 鈦酸鍶 7
2.1.2 銀 7
2.1.3 亞甲基藍 8
2.2 光催化原理 10
2.3 添加物對半導體之影響 12
2.3.1 添加金屬 12
2.3.2 複合型半導體薄膜 14
2.4 光催化動力反應模式 15
2.5 影響光催化之參數 17
2.6 薄膜沉積 18
2.6.1 薄膜沉積機制 19
2.6.2 薄膜形成之機制 22
2.7 濺鍍理論 23
2.7.1 射頻濺鍍 24
2.7.2 磁控濺鍍 25
3 第三章 實驗方法 27
3.1 實驗流程 27
3.1.1 實驗材料 28
3.1.2 實驗設備 29
3.2 靶材製作 30
3.3 基板清洗 34
3.4 薄膜製程 35
3.5 儀器分析 36
3.5.1 X光繞射儀 36
3.5.2 原子力顯微鏡 37
3.5.3 場發射型掃瞄式電子顯微鏡 38
3.5.4 X光光電子能譜儀 39
3.5.5 固態紫外光-可見光光譜儀 40
3.5.6 光學曲率量測儀 40
3.5.7 液態紫外光-可見光光譜儀 42
4 第四章 結果與討論 44
4.1 SrTiO3單層薄膜 44
4.1.1 X光繞射儀分析結果 44
4.1.2 場發射型掃瞄式電子顯微鏡分析結果 46
4.1.3 固態紫外光-可見光光譜儀分析結果 48
4.2 奈米銀 49
4.2.1 X光繞射儀分析結果 50
4.2.2 原子力顯微鏡分析結果 50
4.2.3 場發射型掃瞄式電子顯微鏡分析結果 53
4.2.4 X光光電子能譜儀分析結果 55
4.3 nano-Ag/SrTiO3複合薄膜 55
4.3.1 X光繞射儀分析結果 56
4.3.2 場發射型掃描式電子顯微鏡分析結果 58
4.3.3 X光光電子能譜儀分析結果 60
4.3.4 固態紫外光-可見光光譜儀分析結果 61
4.4 光學曲率量測儀分析結果 64
4.5 光催化降解M.B.之分析 66
4.6 與前人文獻之比較 68
5 第五章 結論 70
6 參考文獻 72

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