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系統識別號 U0026-1403201914111300
論文名稱(中文) 運用AAO模板製作金奈米柱氣體感測器與應用於物聯網前端裝置之研究
論文名稱(英文) The study of Au nanorod gas sensor and the front end devices apply on Internet of Thing
校院名稱 成功大學
系所名稱(中) 微電子工程研究所
系所名稱(英) Institute of Microelectronics
學年度 107
學期 2
出版年 108
研究生(中文) 李健榆
研究生(英文) Chien-Yu Li
學號 Q18021014
學位類別 博士
語文別 英文
論文頁數 115頁
口試委員 指導教授-洪茂峰
口試委員-王永和
口試委員-朱聖緣
口試委員-李文熙
口試委員-胡振國
召集委員-曾百亨
口試委員-陳立軒
口試委員-王納富
口試委員-黃建榮
中文關鍵字 陽極氧化鋁模板  金奈米柱  硫化氣體感測器  氧化鋅摻鋁/矽蕭基二極體  表面聲波濾波器模擬  雙工器  物聯網 
英文關鍵字 Anodic aluminum oxide template  Au nanorod  Sulfide gas sensor  AZO/Si schottky diode  SAW filter simulation  Duplexer  IoT 
學科別分類
中文摘要 隨著現今科技的快速發展與人們對於生活環境的要求,物聯網此一科技概念逐漸成為重視,物聯網依照其概念可分成三個層級:應用層、網路層與感測層,透過感測層在感測端對大量的感測元件針對不同的場景進行感知與監控蒐集資訊,並透過網路層進行傳輸管理,進而在應用層之應用端執行智慧遙控如遠端醫療、交通管制…等多項應用。因此物聯網中的感測器占有極重要的角色,堪稱為物聯網中的核心技術。所謂的感測器在細分結構的情況下又可分為:電力供應元件、感測元件與無線射頻元件等。本論文針對氣體感測的架構分別進行相關技術的研究。
第一部份,本論文針對氣體感測元件提出利用陽極氧化鋁模板製備金奈米柱作為硫化氣體的感測。陽極氧化鋁模板具備高密度、高比表面積(Specific surface area)與高規則性孔洞。利用此模板特性可輔以電化學沉積技術製備高比表面積之金奈米柱,具有相較於金薄膜高靈敏度之氣體感測。我們亦透過過氧化氫溶液對陽極氧化鋁模板進行表面改質並於金電鍍液中加入二甲基亞砜(DMSO) 進行濃稠度改質以及調變電鍍液之酸鹼值。透過此一優化製程所製備出的金奈米柱具有(111)優選取向之類單晶結構。而利用此金奈米柱進行甲基硫醇氣體感測易得到高靈敏性與高選擇性的感測結果。
第二部份,我們利用AZO/Si異質皆面特性製作高崩潰電壓與低漏電流之蕭特基二極體。我們利用氫電漿於矽基板上進行轟擊以減少矽基板上之懸浮鍵,並透過調變AZO之製程參數得到高導電性之AZO薄膜。透過氫電漿的處裡可以有效減少矽與AZO薄膜間的缺陷,從而減少介面上之載子缺陷複合中心。接著我們利用保護環的結構與快速熱退火來增加AZO/Si 二極體之崩潰電壓並減少其漏電流路徑。我們成功製作出高崩潰電壓(>200V)與低漏電流密度(<75μA/mm2)之蕭特基二極體。此一低漏電流密度之二極體為適合運用於低功率消耗的電力元件。
第三部份,本論文針對RF 射頻元件相關技術進行研究,我們運用壓電材料之表面聲波特性,提出一快速模擬表面聲波諧振器、階梯式表面聲波濾波器和雙工器的模擬方法。此雙工器之模擬操作頻段Tx為824-849(MH)而Rx為869-894(MHz),透過表面聲波濾波器的模擬,我們得到階梯式表面聲波濾波器具有比雙模態濾波器低的插入損耗、高的功率耐受度與寬的頻寬。因此,透過此以階梯式濾波器的模擬,調變其串聯諧振器與並聯諧振器之共振頻率與頻寬,再經過多階的串聯後可以得到具有以下優異特性之雙工器模擬:1.通帯中低差入損耗 2.拒帶中快速衰減之高插入損耗 3.傳輸與接收端高隔離度。
英文摘要 With the rapidly develop of technology and the requirement to the environment, the conception of Internet of Thing (IoT) has been emphasized by industry and academic. The conception of IoT can be divided in three level: application layer, network layer, and sensor layer. The multi sensors in the sensor layer collect and monitor the information under different environment. The collected information are transmit through the network layer to the application layer for the request such as remote medical care, traffic control…etc. Therefore, the sensor is the core technic of the IoT network. The basic sensor structure are composed of power supply unit, sensor unit, and wireless radio frequency unit. In the dissertation, we focused on the research and discussion of technic relative to the three part.
In the sensor unit section, we mentioned the Au nanorod sulfide gas sensor fabricated by the Anodic Aluminum Oxide template (AAO). AAO template exhibits the outstanding characteristic of high surface density, high specific surface area, and high regularity pore for the nanomaterial fabrication. The Au nanorod synthesized with the aid of AAO template by electro deposition process has a higher sensitivity than the thin film structure for the gas sensing due to the high regularity and high specific surface. We also optimized the electro deposition process by the AAO template surface modification under H2O2 solution. The electrolyte was also modulated with the DMSO additive and pH value. The optimized electro process improve the crystal characteristic of the Au nanorod which exhibit the single crystal structure of (111) orientation peak. The single phase Au nanorod has a high sensitivity and selectivity to the sulfide gas.
In the second part, we discuss the Schottky barrier diode in the boost circuit. We develop the AZO/Si schottky barrier diode with high breakdown voltage and low leakage current property. We enhance the electric conductivity of the AZO thin film by modulating the process parameter. We also applied the Hydrogen plasma bombard to reduce the dangling bonds on the surface of Si substrate. In order to reduce the leakage current pathway and increase the reverse breakdown voltage, we adding the guard ring structure at the side of the AZO/Si diode. The structure of schottky diode has an excellent electric properties of >200V breakdown voltage and <75μA/mm2 which can be applied on the low power consumption power unit.
In the third part, we discuss the radio frequency unit of surface acoustic wave duplexer. We propose the rapid simulation of the surface acoustic wave resonator, ladder type filter, and duplexer with the piezoelectric material LiTaO3. The ladder type filter was composed with the serial and parallel arrangement of the SAW resonator. With the simulation of SAW filter, the duplexer composed with ladder type structure filter possesses a lower insertion loss, wider passband bandwidth, and higher power durability than the duplexer composed with double mode saw (DMS). Through the ladder type SAW filter simulation, the passband bandwidth and the insertion loss of the duplexer can be obtain by the modulation of the serial and parallel resonators’ resonate frequency. We can obtain a duplexer (Tx 824-849 MHz and Rx 869-894 MHz) with the low insertion loss at pass band, steep cutoff at rejection band, and high isolation between Tx-Rx.
論文目次 摘要 I
Abstract III
Content VIII
List of Tables XII
List of Figures XIII
Chapter1 Introduction 1
1-1 Introduction of Gas sensor 3
1-2 Introduction of Schottky barrier diode 5
1-3 Introduction of Surface Acoustic Wave filter 9
1-4 Motivation 13
1-5 Overview of the dissertation 15
Chapter 2 Theory 17
2.1 Gas Sensor theory 17
2.1.1 Gas sensor characterization 17
2.2 Schottky Barrier diode theory 18
2.2.1 Schottky barrier diode operation principle 18
2.2.2 The breakdown of Schottky diode 19
2.3 Theory of Surface Acoustic Wave 22
2.3.1 The introduce of Inter-Digital Transducers 22
2.3.2 Piezoelectric material 24
2.4 Deposition process principle 27
2.4.1 Electrodeposition principle 27
2.4.2 Sputtering principle 29
2.5 The measurement introduction 31
2.5.1 Field Emission-Scanning Electron Microscope (FE-SEM) 31
2.5.2 X-ray diffraction (XRD) 32
Chapter 3 The fabrication of high sensitivity gold nanorod H2S gas sensors utilizing the highly uniform anodic aluminum oxide template 33
3.1 Introduction 33
3.2 Experimental details 37
3.2.1 Preparation of nanoporous AAO 37
3.2.2 Synthesis of gold nanorod 38
3.2.3 Gas detection system construction 39
3.3 Results and discussion 40
3.3.1 The characteristic of AAO and Au nanorod 40
3.3.2 The detection of H2S gas 42
3.4. Summary 46
Chapter 4 Synthesis of single-phase Au nanorods in an anodic aluminum oxide template with an optimized process for a highly sensitive and non-enzyme methyl mercaptan gas detector 48
4-1 Introduction 49
4-2 Surface modification 50
4-3 Experimental details 53
4-3-1 Chemicals and instruments 53
4-3-2 Nanoporous AAO preparation 53
4-3-3 Surface modification and Single-phase Au nanorod synthesis 54
4-3-4 Gas sensor fabrication 54
4-3-5 Measurements 55
4-4 Results and discussion 56
4-4-1 Au nanorod analysis 56
4-4-2 Mercaptan gas detection 61
4-5 Summary 64
Chapter 5 Electric characteristic enhancement of an AZO/Si schottky barrier diode with hydrogen plasma surface treatment and AlxOx guard ring structure 66
5-1 Introduction 66
5-2. Fabrication of AZO/Si diode 68
5-2-1 Si wafer treatment 68
5-2-2 AZO and guard ring fabrication 69
5-2-3 device characteristic 70
5-3. Results and discussion 70
5-4. Summary 79
Chapter 6 Investigation of characteristics of dual-band Ladder-type surface acoustic wave for high-power durability duplexer 81
6-1 Introduction 82
6-2 Resonator simulation 85
6-3 Ladder-type SAW Simulation 89
6-4 Summary 95
Chapter 7 Conclusion 97
7-1 conclusion 97
7.2 Future work 99
Reference 101
Publication List 114
Vita 115
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