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系統識別號 U0026-1108201416110800
論文名稱(中文) 全光纖式快速光致螢光與拉曼量測系統
論文名稱(英文) All-fiber Rapid Photoluminescence and Raman Measurement System
校院名稱 成功大學
系所名稱(中) 光電科學與工程學系
系所名稱(英) Department of Photonics
學年度 102
學期 2
出版年 103
研究生(中文) 劉依旻
研究生(英文) Yi-MinLiu
學號 l76014239
學位類別 碩士
語文別 英文
論文頁數 66頁
口試委員 指導教授-崔祥辰
口試委員-陳南光
口試委員-王偉華
口試委員-徐裕奎
中文關鍵字 拉曼光譜儀  光致螢光光譜儀  快速掃描成像系統  石墨烯 
英文關鍵字 Raman spectroscopy  PL spectroscopy  rapid mapping system  graphene 
學科別分類
中文摘要 拉曼光譜儀和光致螢光光譜儀在許多領域當中已經被廣泛的使用,舉凡物理、化學、材料科學、生物、半導體、太陽能、及醫藥方面。它們都已經是成熟的商業化產品並且已經擁有許多方面的應用。拉曼光譜儀和光致螢光光譜儀擁有許多特性與優點,例如:非接觸性量測、容易組裝、廣泛的量測用途、快速的面積掃描量測、以及精確的分析等等。在本系統中,為了增進儀器的量測效能並且降低組裝成本,我們導入了具有孔狀結構的反射鏡來取代傳統的半穿透半反射鏡片的架構。並且我們使用了兩種不同的量測手法更近一步的來縮短量測時間,分別是X-Y量測法以及R-θ量測法分別扮演了重要的角色。
然而,為了驗證本儀器的量測效能,我們準備了許多不同的樣品做為量測的媒介,例如:機械剝離法製成的石墨烯、化學氣相沉積法製成的石墨烯、懸掛式及貼面式之石墨烯、氫鍵改質之石墨烯、二硫化鉬、鋁砷化鎵等材料。為了滿足某些實驗上的特殊需求,我們也使用了偏振拉曼系統來量測,並且使用勞倫茲方程,藉由Origin軟體做為我們的分析拉曼光譜及螢光光譜的工具。快速掃描載台在本研究中也扮演了相當重要的角色,藉由本載台,我們可以執行X-Y量測法以及R-θ量測法。在終極目標中,我們希望可以發展出更便宜、更方便、更快、模組化設計、自動化控制、以及電腦控制的光譜儀器。
英文摘要 Raman and Photoluminescence (PL) spectroscopy are widely used in many fields, including physics, chemistry, materials science, biology, semiconductor, solar cell, and medicine. Until now, there are mature commercial products. It has many advantages, such as non-contact measurements, widely usages, rapid mapping measurements, and precise analysis. To improve the scanning efficiency of these instruments, we modify the optical design based on the design of traditional spectroscopy. Here, a hole mirror was also been imported in this system. And two kinds of measurement method, X-Y measurement and R-θ measurement method are being analyzed in this design of system.
However, to verify performance of this spectroscopy, we prepared many kinds of sample for testing, such as CVD graphene, mechanical exfoliation graphene, supported and suspended graphene, hydrogen-terminated graphene, MoS2, and AlGaAs. For experimental requirement, polarized Raman spectroscopy has been used and Origin is our fitting tool for Raman or PL spectra by Lorentzian function. Rapid mapping stage plays an important role in this research, too. It helps to execute the X-Y measurement or R-θ measurement method. In final goal to these spectroscopy, cheaper, more convenience, faster, modularization design, and automatic control by computer are been expected.
論文目次 Abstract i
論文摘要 ii
致謝 iii
Chapter 1 Introduction 1
1-1. Research Motivation 1
1-2. Literature review 2
1-3. Overview of the Thesis 3
Chapter 2 Theoretical Background 5
2-1. Introduction of Samples 5
2-1.1. Graphene 5
2-1.2. MoS2, MoSe2, WSe2 8
2-1.3. AlGaAs 10
2-2. Introduction of Spectroscopy 12
2-2.1. Introduction of Raman Spectroscopy 12
2-2.2. Introduction of PL Spectroscopy 14
Chapter 3 Experimental Processes 18
3-1. Fabrication of samples 18
3-1.1. Graphene 18
3-2. Optical setup of system 21
3-2.1. The optical setup of Raman spectroscopy 21
3-2.2. The optical setup of PL spectroscopy 25
3-3. Measurement method 29
Chapter 4 Experimental Results and Discussions 32
4-1. Raman Measurement 32
4-1.1. Raman measurement of single layer graphene and analysis 32
4-1.2. Polarized Raman measurement of single layer graphene and analysis 37
4-1.3. Raman measurement of suspend and support graphene 51
4-1.4. Raman measurement of hydrogen-terminated graphene 55
4-1.5. Raman measurement of MoS2 57
4-2. PL Measurement 57
Chapter 5 Conclusion 62
5-1. Summary 62
5-2. Future Improvements 62
Reference 64

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