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系統識別號 U0026-1108201118075400
論文名稱(中文) 超音波能量影響界面反應及介金屬化合物相變化於銅打線製程之研究
論文名稱(英文) Ultrasonic Power Effect on Interfacial Reactions and Phase Transformations of IMC for Copper Wire Bonding
校院名稱 成功大學
系所名稱(中) 材料科學及工程學系碩博士班
系所名稱(英) Department of Materials Science and Engineering
學年度 99
學期 2
出版年 100
研究生(中文) 許登傑
研究生(英文) Deng-Jie Hsu
學號 N56981060
學位類別 碩士
語文別 中文
論文頁數 80頁
口試委員 指導教授-呂國彰
口試委員-林光隆
口試委員-許薰丰
中文關鍵字 銅打線  超音波能量  介金屬相變化  界面反應 
英文關鍵字 Copper wire bond  ultrasonic power  phase transformations of IMC  interfacial reactions 
學科別分類
中文摘要 本研究主要以不同的超音波震盪之電流及能量作為銅打線製程的參數,並經由熱處理來觀察介面反應與介金屬化合物的相變化,以尋較好的條件使銅打線可擁有較好的可靠度。
研究當中指出,據有較高的USG PreBleed之打線製程的銅球會較為柔軟,並可減少鋁墊所受到的擠壓與損害,且對於介面所生成的介金屬化合物對照於較硬的銅球來的均勻及薄。
介金屬化合物的相變化在本研究也被探討,在150℃之不同時間的熱處理下,所產生的相包含有三種,分別為Cu9Al4 、CuAl及CuAl2,其結果於本論文最後說明之。
英文摘要 In this study, we used different current, power of ultrasonic vibration and heat treatments for copper wire bonding to investigate the interfacial reactions and phase transformations of intermetallic compounds for better reliability.
It was found that higher USG PreBleed of the wire bonding process led to softer copper balls and less extrusion and damage of aluminum pads, contributing to the more uniform and thinner intermetallic compounds.
At different stages of heat treatments at 150。C, the phase transformations of the IMC, including Cu9Al4, CuAl and CuAl2, were also studied. The results may be attributed to the kinetics and thermodynamics of the IMC.
論文目次 總目錄
中文摘要 I
Abstract II
致謝 III
總目錄 IV
圖目錄 VII
第壹章 前言 1
第貳章 文獻回顧與理論基礎 4
2.1 打線接合製程介紹 4
2.1.1 打線接合方法 4
2.1.2 打線接合製程對銅打線的影響 5
2.1.3 超音波電流及能量對銅打線的影響 6
2.2 銅鋁間介金屬化合物 15
2.2.1 銅鋁間介金屬化合物與金鋁間介金屬間化合物的比較 15
2.2.2 銅鋁間介金屬間化合物的介紹 16
第參章 實驗步驟及方法 25
3.1 實驗動機 25
3.1.1實驗構想 25
3.2實驗步驟 28
3.2.1 不同超音波電流及能量製造的銅打線 28
3.2.2 可靠度測試條件 30
3.2.3 試片製作 30
3.3 試片分析及銅鋁間介金屬化合物觀察 31
3.3.1 場發射掃描式電子顯微鏡(FE-SEM) 31
3.3.2能量分散光譜儀(EDS) 33
3.3.3 歐傑電子能譜儀(AES) 33
第肆章 實驗結果與討論 38
4.1 超音波電流及能量對銅打線外觀造成的影響 38
4.1.1 不同超音波電流及能量對銅球外觀造成的影響 38
4.2 超音波能量對銅鋁間介金屬化合物造成的影響 41
4.2.1 不同超音波能量製造的銅打線橫截面微觀結構觀察 41
4.2.2 不同超音波能量製造之銅打線對銅球與鋁墊造成影響 42
4.2.3不同超音波能量之銅打線製程對其銅鋁間介金屬化合物造成的影響 47
4.2.4 不同超音波能量製程之銅打線銅鋁間介金屬化合物相的分析 52
4.3 經長時間熱處理銅打線的銅鋁間介金屬相的觀察 56
4.3.1 銅鋁間介金屬化合物經長時間退火下的微觀結構觀察 56
4.3.2 銅鋁間介金屬化合物各層元素分佈之分析 58
4.3.3 銅鋁間介金屬化合物微觀結構元素分佈之分析 58
4.3.4銅鋁間介金屬化合物各層元素成分之分析 64
4.4 經長時間熱處理銅打線之銅鋁間介金屬化合物相變化情形探討 68
第伍章 結論 74
第陸章 未來展望 76
參考文獻 77

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