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系統識別號 U0026-1107201616420200
論文名稱(中文) 可處理隨機量測時延之混合式批次間控制器設計
論文名稱(英文) Design of Hybrid Run-to-Run Controllers Subject to Stochastic Metrology Delay
校院名稱 成功大學
系所名稱(中) 化學工程學系
系所名稱(英) Department of Chemical Engineering
學年度 104
學期 2
出版年 105
研究生(中文) 羅鈞
研究生(英文) Chun Lo
學號 n36031112
學位類別 碩士
語文別 中文
論文頁數 98頁
口試委員 指導教授-黃世宏
口試委員-張玨庭
口試委員-吳煒
口試委員-陳世明
中文關鍵字 批次間控制  混合式控制器設計  狀態空間系統模型  性能指標  強健穩定性  隨機量測時延 
英文關鍵字 Run-to-run control  hybrid controller design  state-space stochastic model  performance  stability  stochastic metrology delay 
學科別分類
中文摘要 在半導體產業中,EWMA及double EWMA批次間控制器對於固定的量測時延有相當良好的控制效果。然而價格昂貴的量測設備和耗時的量測,會使得量測時延產生不確定性及隨機性。針對隨機量測時延的問題,本論文提出三種以內模控制架構為依據之混合式批次間控制器,並發展控制器的最佳設計方法。
批次間控制器常需處理多種形式之確定性與隨機性擾動,兩者會導致製程輸出偏離目標值和持續性隨機變動。本論文引入一隨機變數來描述量測時延,並建立隨機控制系統之擴增狀態及狀態空間模型,以分析與確定性擾動相關之暫態性能、與隨機性擾動相關之長期性能及控制系統的強健穩定性。本論文所提之混合式批次間控制器分別使用一階和二階內模控制濾波器來預測含偏移和含漂移的擾動。暫態和長期性能指標被結合為權衡性能指標,作為選擇濾波器參數的標準。為了在指定強健性限制下達成最佳控制,本論文推導出前述性能指標及隨機控制系統穩定性之閉合公式,可在隨機時延期望值介於0和1之間時,獲得滿意之濾波器參數設計。
英文摘要 In semiconductor manufacturing, run-to-run (RtR) controllers such as EWMA (exponentially weighted moving average) and double EWMA controllers work well for fixed metrology delay. However, expensive metrology devices and time-consuming measurement may render metrology delay uncertain and stochastic. To deal with the problem of stochastic metrology delay, this thesis presents three hybrid RtR controllers based on the internal model control (IMC) structure and develops the design methodologies.

RtR controllers are often faced with various deterministic and stochastic disturbances, which may cause the process output to deviate from the target and fluctuate persistently. To evaluate their effects on performance and stability of control system under stochastic metrology delay, The thesis introduces a random variable to describe the metrology delay, and establishes a state-space stochastic system model with augmented states to analyze the transient performance in relation to the deterministic disturbance, long-run performance in relation to the stochastic disturbance, and robust stability of the control system. The proposed hybrid RtR controllers utilize a first-order and a second-order IMC filter to predict the disturbance consisting of a shift and that consisting of a drift respectively. The transient and long-run performance indices are combined to give trade-off performance index, which serves as the criterion for the selection of the filter parameters. To achieve the optimal control under the specified constraint on robustness, the thesis derives closed-form formulae for the aforementioned performance indices and stability of the stochastic control system. These formulae can be used to find satisfactory filter parameters for the expected value of the metrology delay between 0 and 1.
論文目次 摘要 I
Abstract II
誌謝 XI
目錄 XII
表目錄 XV
圖目錄 XVI
符號表 XIX
第一章 緒論 1
1.1前言 1
1.2研究動機與目的 3
1.3章節與組織 3
第二章 批次間控制理論回顧 5
2.1 含輸出擾動之批次程序 5
2.2 傳統控制器設計 6
2.2.1 無量測時延之EWMA控制法 6
2.2.2 無量測時延之Double EWMA控制法 7
2.3 內模控制架構 8
2.4 內模控制濾波器設計 11
2.5內模控制架構之開環轉移函數推導 14
2.6 強健性指標 15
第三章 混合式批次間控制器設計 18
3.1 程序描述與量測延遲模型 18
3.2 混合式批次間控制器架構 20
3.3 狀態空間系統模型 25
3.4 混合式批次間控制器性能指標及穩定性 29
3.4.1 暫態性能指標 29
3.4.2 長期性能指標 31
3.4.3 權衡性能指標 33
3.4.4 隨機量測時延系統穩定性 34
第四章 混合式批次間控制器應用於偏移擾動 36
4.1 混合式批次間控制架構濾波器之參數設計 36
4.1.1 無強健性限制之參數設計 38
4.1.2 受強健性限制之參數設計 38
4.2權衡性能指標及穩定性閉合公式 40
4.3穩定性及權衡性能指標分析 43
4.3.1各控制器之模擬結果 43
4.3.2各混合式批次間控制器受GMd限制後之變化分析 49
4.3.3 χ 值對各混合式批次間控制器之影響 54
4.4混合式批次間控制器之建議設計 60
第五章 混合式批次間控制器應用於漂移擾動 62
5.1 混合式批次間控制架構之濾波器參數設計 62
5.1.1 無強健性限制之參數設計 64
5.1.2 受強健性限制之參數設計 64
5.2權衡性能指標閉合公式 70
5.3穩定性分析及性能指標分析 71
5.3.1各控制器之模擬結果 72
5.3.2混合式控制器B受時延邊限限制之變化分析 76
5.3.3混合式控制器C受GMd限制之變化分析 80
5.3.4 χ 值對混合式控制器B及C之影響 83
5.4混合式控制器之建議設計 92
第六章 結論 94
參考文獻 96
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王信淳,“混合式批次間控制器設計:不確定時延及複合性能指標相關議
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