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系統識別號 U0026-0910201816140100
論文名稱(中文) 單拍陰影疊紋表面形貌量測系統之研發
論文名稱(英文) Development of a One-Shot Shadow Moiré System for Surface Profile Measurement
校院名稱 成功大學
系所名稱(中) 機械工程學系
系所名稱(英) Department of Mechanical Engineering
學年度 106
學期 2
出版年 107
研究生(中文) 程法彥
研究生(英文) Fa Yen Cheng
電子信箱 tom606f4@gmail.com
學號 N16051257
學位類別 碩士
語文別 中文
論文頁數 99頁
口試委員 指導教授-陳元方
口試委員-王偉中
口試委員-林世聰
口試委員-羅裕龍
中文關鍵字 陰影疊紋法  螺旋正交轉換  單拍  光流法 
英文關鍵字 shadow moiré  spiral phase quadrature transform  one-shot  optical flow 
學科別分類
中文摘要 本文將光流法及螺旋正交轉換應用於陰影疊紋法中,設計一套能動態量測的單拍陰影疊紋表面形貌量測系統,其架設是將傳統相位移法中的設置更改為兩組不同色的光源,利用彩色相機擷取兩組不同顏色的條紋圖,再利用光流法及螺旋正交轉換計算出相位差90度的條紋圖,進而計算條紋相位,經由相位展開法得到相位值,最後得到試件的表面形貌。本文分為模擬與實驗兩個部分,在模擬部分利用陰影疊紋法理論探討兩組疊紋圖的相位差與燈源位置的關係,進而訂定系統量測的最大高度限制並提出超過最大高度限制時的解決方案,當超過最大高度限制時條紋方向角會差180度,將超出位置條紋方向角補上180度則能解決該問題,再利用模擬多種表面形貌在三組不同光源入射角的光源組合的量測結果,藉此決定出最適合的光源入射角為45度,實驗部分則是比較兩種能減少不同光源的光強影響的影像處理方法,並與SMS粗度儀量測比較本系統的準確性,平均誤差為6.1μm,誤差標準差5.1μm。
英文摘要 In this paper, the optical flow method and spiral quadrature transformation are applied to the shadow moiré method. One shot shadow moiré surface profile measurement system capable of dynamic measurement is designed. This system is built on setup of traditional phase-shift system. Original light source is replaced by two polychromatic light sources. Capture two sets of fringe patterns of different colors by color camera, and then the fringe pattern with a phase difference of 90 degrees is calculated by optical flow method and spiral quadrature transform. Two 90 degrees pattern can calculate the fringe phase, and the phase vale can be obtained by the phase unwrapping method. Finally the unwrapping phase can calculate the surface profile of the specimen.
This paper is divided into two parts: simulation and experiment. In the simulation part, the relationship between the phase difference of the two sets of moiré patterns and the position of the light source is discussed by theory of shadow moiré method, and then the maximum height limit of the system measurement is set and a solution that exceeds the maximum height limit is proposed. When the maximum height limit is exceeded, the fringe orientation angle will different 180 degrees. So the position exceeded the limit adds 180 degrees can solve the problem. Then simulating multiple surface profile in three different sets of light source incident angles. The measurement result of the light source combination determines the most suitable light source incident angle is 45 degrees. The experimental part compares two image processing methods that can reduce the influence of light intensity of different light sources, and measures with the SMS roughness meter. Comparing the result of the system, the average error is 6.1 μm and the error standard deviation is 5.1 μm.
論文目次 摘要 I
致謝 V
目錄 VI
圖目錄 IX
表目錄 XIV
符號說明 XVI
1. 緒論 1
1.1研究背景及目的 1
1.2文獻回顧 2
2. 原理 4
2.1陰影疊紋法 4
2.2條紋圖之影像處理 10
2.2.1伸張強化 10
2.2.2條紋影像正規化[20] 10
2.3相位解析法 12
2.3.3影像去背景光 12
2.3.1螺旋正交轉換 13
2.3.2條紋方向角 14
2.4 Macy相位展開法 19
3. 形貌量測系統模擬分析與討論 21
3.1量測系統設計分析與模擬 21
3.1.1斜平板量測模擬 23
3.1.2圓形曲面量測模擬 35
3.1.3馬鞍型曲面量測模擬 45
3.1.4正弦曲面量測模擬 51
3.2系統高度量測限制 54
3.2.1斜平板量測模擬 54
3.2.2圓形曲面量測模擬 64
3.3.3馬鞍型曲面量測模擬 67
3.3.4比較轉折曲面和超出180度相位高度 70
3.3臨界點判斷及校正條紋方向角方法 72
3.4模擬結果討論 75
4. 實驗驗證 76
4.1實驗架設 76
4.2實際量測 79
4.2.1斜平板量測 79
4.2.2圓形曲面量測 86
4.2.3晶圓量測 90
4.3實驗量測與討論 94
5. 結論與未來展望 95
5.1 結論 95
5.2 未來展望 96
6. 參考文獻 97


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