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系統識別號 U0026-0812200915272113
論文名稱(中文) 藉由飛秒雷射製作三維電漿子元件
論文名稱(英文) 3D Plasmonic Devices Using Femtosecond Laser Fabrication
校院名稱 成功大學
系所名稱(中) 工程科學系碩博士班
系所名稱(英) Department of Engineering Science
學年度 97
學期 2
出版年 98
研究生(中文) 吳建豪
研究生(英文) Jian-hao Wu
學號 n9696147
學位類別 碩士
語文別 中文
論文頁數 65頁
口試委員 指導教授-陳顯禎
口試委員-張允崇
口試委員-曾碩彥
中文關鍵字 多光子激發  三維電漿子元件 
英文關鍵字 multiphoton excitation  3D plasmonic devices 
學科別分類
中文摘要 多光子激發(multiphoton excitation,MPE)為一非線性光學現象,其現象與光強二次方成正比,需要在光子密度非常高的情況下才會有較高的機率發生,例如在雷射聚焦處,且必須使用飛秒雷射來達成此現象,進而利用它的特性來製作三維奈微米元件。加工樣品主要以三羥甲基丙烷三丙烯酸酯(trimethylolpropane triacrylate,TMPTA)來作為反應單體,加入光起始劑孟加拉玫瑰素(rose bengal) 1 mM以及共同起始劑三乙醇胺(triethylamine,TEA) 0.1 M,依不同濃度調配後,利用800 nm左右波長之飛秒雷射光束來進行雙光子高分子聚合反應(polymerization)。在製作電漿子元件上選擇加入金奈米柱(nanorod)於我們加工的樹脂內,這樣一來加工結構中即有包含金屬。實驗中使用Ti:sapphire飛秒雷射做為光源,並成功利用資料擷取卡中的FPGA模組控制整體系統,驅動控制雙軸震鏡掃描器與z軸奈米壓電致動器,搭配聲光調變器控制雷射光源在加工樣品上的工作與否,進而將高分子聚合固化。而事先加入螢光染劑於試劑中,可在加工後利用雙光子螢光顯微鏡上觀察三維影像,或利用金奈米柱本身之雙光子致光(two-photon luminescence)訊號來觀測。本論文利用自行研發之飛秒雷射加工系統已完成製作結構複雜的奈微米三維元件,並在樹脂內添加金奈米柱來製作三維電漿子元件。
英文摘要 Multiphoton excitation is a nonlinear optical phenomenon. It occurs only at a small volume around the focusing spot with very high density photon, because the possibility of the phenomenon is proportional to the square of light intensity density. In this thesis, a two-photon polymerization based on a multifunctional femtosecond laser system is used to develop three-dimensional (3D) micro-structures. The two-photon polymerization of trimethylolpropane triacrylate (TMPTA) with initiator rose bengal of 1 mM and a co-initiator triethylamine of 0.1 M is excited by using a Ti:sapphire femtosecond laser at the wavelength about 800 nm. The laser focusing spot is controlled on or off through 3D TMPTA volume solution, and then the two-photon polymerization will occur along the designed pattern. Furthermore, gold nanorods are added into the TMPTA resin for fabricating 3D plasmonic devices. The femtosecond laser fabrication system has been successfully developed. Its real-time controller based on a NI data equitation board with field programmable gate array modules can regulate a two-axis galvanometer, a z-axis piezoelectric actuator, and an acoustic-optic modulator to depict 3D micro-devices under designed pattern. The polymer micro-structures can be imaged by two-photon excited fluorescence microscopy with rhodamine 6G stain. Also, two-photon luminescence can be found in the plasmonic devices. In summary, we have successfully fabricated complex 3D micro-devices and attempt to develop 3D plasmonic devices with gold nanorods.
論文目次 摘要 I
Abstract II
誌謝 I
目錄 V
圖目錄 VIII
第一章 序論 1
1-1 前言 1
1-2 文獻回顧 2
1-3 研究動機及目的 4
1-4 論文架構 5
第二章 多功能超快雷射系統 6
2-1 超快雷射 6
2-2 整體系統 8
2-2-1 光路設計 8
2-2-2 電路設計 10
2-2-3 介面控制 16
2-3 操控介面與軟體 17
2-4 系統校正 20
第三章 超快雷射分子影像與奈微米加工 23
3-1 分子影像 23
3-1-1 二倍頻影像 23
3-1-2 雙光子螢光影像 27
3-1-3 螢光生命週期顯微影像 29
3-2 奈微米加工 32
3-2-1 焦點位置校正 32
3-2-2 脈衝選擇器 34
3-2-3 大範圍掃描 35
3-2-4 自由型態之三維結構 37
第四章 雙光子吸收光致聚合效應 40
4-1 原理與材料 40
4-2 單光子與雙光子聚合 42
4-2-1 單光子聚合 42
4-2-2 雙光子聚合 46
4-3 3D元件製作 48
4-3-1 光柵 48
4-3-2 3D中空圓管 51
4-3-3 複雜結構 53
4-4 螢光分子於樹脂內光漂白之問題 55
4-5 三維電漿子元件 57
第五章 結論與未來工作 60
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