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系統識別號 U0026-0812200914333153
論文名稱(中文) 熱泡式微泵浦應用於熱傳技術之研究發展
論文名稱(英文) Studies of Thermal Bubble Pump for Heat Transfer Technology
校院名稱 成功大學
系所名稱(中) 航空太空工程學系碩博士班
系所名稱(英) Department of Aeronautics & Astronautics
學年度 96
學期 2
出版年 97
研究生(中文) 黃南嘉
研究生(英文) Nan-Jia Huang
電子信箱 p4695110@mail.ncku.edu.tw
學號 p4695110
學位類別 碩士
語文別 中文
論文頁數 84頁
口試委員 指導教授-呂宗行
指導教授-王金燦
口試委員-王覺寬
中文關鍵字 微加熱器  微機電製程技術  熱泡式微泵浦 
英文關鍵字 Thermal Bubble Pump  MEMS Fabrication  Micro Heater 
學科別分類
中文摘要 本研究為能解決微型毛細泵吸環路(Micro Capillary Pumped Loop, MCPL)運作時,蒸汽線傳輸壓阻過大的問題,採用微機電製程技術製作一定熱通量熱泡式微泵浦來探討微管道內移動汽泡之物理機制。實驗透過管道內部表面改質技術製作親疏水性相間區域,利用表面能量分佈的特性,在不加外力驅動下而能產生快速移動汽泡的驅動力。
在晶片製作過程中,因鋁化鉭(TaAl)合金無法承受熱融合接合時的高溫(約630℃),然研究發現採用聚二甲基矽氧烷(PDMS)為中間層時,可成功於低溫(約180℃)條件接合並製作出所需晶片。研究中對於汽泡成核(nucleation)、成長(growth)、與移動(movement)等現象的探討乃採視流觀察法;此外,研究亦比較相同熱通量但不同加熱位置及相同加熱位置但不同熱通量的條件下,觀察管道大小對汽泡的影響。實驗結果顯示管道寬為500micron時,在微加熱器h2位置因管道開始發生幾何變化而為觀測汽泡移動之最佳位置。當h2以10V(93mW)電壓輸入,汽泡成長到約1000micron時,僅發生左右震盪現象,此時系統應達熱平衡。但當管道寬縮為100micron後,輸入6.2V(76mW)電壓於h2時,則可觀察到汽泡不斷往前移動的情形,顯示管道尺寸效應對系統熱泡的移動存在明顯影響,當管道尺寸縮小時,產生穩定汽泡所需熱通量亦越低,晶片系統也越易產生熱傳效果。
英文摘要 The focus of this study is to solve the problem of high pressure drop when fluid passes through the vapor line in micro capillary pumped loop, MCPL. In this study, MEMS technology is used to fabricate thermal bubble pump that has constant heat flux to investigate the mechanism of driving bubbles. By surface modification, the micro channel has hydrophilic and hydrophobic regions. The distribution of surface free energy will make bubbles move without external force.
Because the TaAl alloy can’t stand the high temperature (630℃) of thermal fusion bonding, this study carries out a low temperature (180℃) bonding method. The device fabricates successfully by using PDMS as the intermediate layer between two substrates. In the experiment, observation of flow visualization is used to investigate the bubble phenomenon including nucleation, growth, and movement. Effects of different heater position with the same heat flux and different heat fluxes in the same position were compared. Furthermore, the effect of channel width is discussed. The result reveals that when channel width is 500micron, heater in the geometry change of channel (h2) is the best position to observe bubbles move or not. When 10V (93mW) is applied to h2, bubble will grow to 1000micron length and reach thermal equilibrium. However, at this state the bubble only oscillates. When channel width reduce to 100micron and 6.2V (76mW) is applied to the heater, the bubble will move forward continuously and have the effect of heat transfer.
論文目次 目錄
摘要 I
Abstract II
誌謝 III
目錄 IV
表目錄 VII
圖目錄 VIII
符號說明 XII


第一章 緒論 1
1-1 前言 1
1-2 相變化散熱機構簡介 2
1-3 研究動機及目的 2
1-4 文獻探討 3
1-4-1 熱泡式微泵浦 3
1-4-2 微型熱交換器 4
1-4-3 表面改質 6
第二章 晶片設計及原理 15
2-1 汽泡移動機制 15
2-2 表面自由能與壓力梯度理論分析 16
2-2-1 表面張力與表面自由能 16
2-2-2 物理模型假設 17
2-2-3 表面自由能變化 17
2-2-4 汽泡壓力關係式 19
2-3 驗證親疏水性對汽泡移動效應 20
2-4 微加熱器原理及電阻值計算 21
2-5 熱泡式微泵浦晶片設計 23
第三章 晶片製作及製程方法 34
3-1 微泡式熱泵浦製程簡介 34
3-2 晶片清潔 35
3-3 微影製程 36
3-4 金屬薄膜沉積 37
3-5 金屬薄膜剝離 37
3-6 微流道製作 38
3-7 表面改質 39
3-8 晶片接合 39
第四章 實驗架構與初步測試 50
4-1 晶片封裝及微加熱器校正 50
4-2 實驗儀器架設及設備 51
4-2-1 實驗儀器架設 51
4-2-2 實驗設備 51
4-3視流觀察(Observation of flow visualization) 51
4-4 實驗方法 52
4-5 實驗初步測試 52
第五章 實驗結果與討論 60
5-1 不同位置、等功率之實驗測試 60
5-2 在h2位置的微加熱器不同功率之實驗測試 62
5-3 等功率下注入不同體積流率的工作流體之實驗測試 64
5-4 管道尺寸效應及汽泡驅動現象之探討 65
第六章 結論與建議 78
參考文獻 80
自述 84
參考文獻 參考文獻

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