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系統識別號 U0026-0812200914044310
論文名稱(中文) 雷射色散特性對位移感測之探討
論文名稱(英文) Laser Dispersive Characteristics Studying for Displacement
校院名稱 成功大學
系所名稱(中) 光電科學與工程研究所
系所名稱(英)
學年度 96
學期 1
出版年 97
研究生(中文) 洪基彬
研究生(英文) Ji-Bin Horng
電子信箱 l7893108@mail.ncku.edu.tw
學號 l7893108
學位類別 博士
語文別 中文
論文頁數 102頁
口試委員 口試委員-黃建榮
口試委員-莊賦祥
口試委員-吳孟奇
口試委員-張忠誠
召集委員-傅永貴
指導教授-周維揚
指導教授-蘇炎坤
中文關鍵字 雷射二極體  色散  外腔共振  位移  感測  感測架構  權重中心法  增益飽和  增益頻譜  正規化回饋光強度  輸出頻譜權重中心  簡單小信號近似模型  自混干涉  寬頻光源  非球面透鏡  全反射面鏡  分光鏡  收光準直器  頻譜儀 
英文關鍵字 Indium Phosphorus  Aluminum Gallium Indium Phosphorus  spectrometer  collimator  beam splitter  mirror  aspheric lens  Amplified Stimulated Emission  self-mixing interference  Laser diode  sensing  dispersion  displacement  weight-center method  gain saturation  gain spectrum  normalized feedback intensity  weight-center of spectrum  simple small approximate model 
學科別分類
中文摘要 本研究提出一種結合光學色散及雷射外腔共振原理的新型高精度非接觸式位移感測法,並進一步探討雷射色散對位移感測之特性;其中,利用雙聚焦搭配單面高反射鍍層雷射二極體的微位移感測架構,以中心波長1550 nm 頻寬60 nm InP增益雷射二極體作Amplified Stimulated Emission (ASE)光源,完成4 μm感測行程,具有2 nm精度的驗證;若以中心波長660 nm 頻寬15 nm AlGaInP增益雷射二極體作ASE光源,則獲得10 μm感測行程內,具有25 nm的精度;同樣以InP增益雷射二極體作ASE光源,於單聚焦撘配單面高反射鍍層雷射二極體位移感測架構下,進行模擬及驗證後,在4 mm感測行程內,則有3 μm的精度。
為快速驗證新型位移感測架構可行性及工程應用的方便性,特提出簡單小信號近似模型,並在模擬結果與實驗數據比對中,得到良好印證;於本研究所提出五種雷射色散位移感測架構中,依所需量測行程及精度要求,可選用合適對應的量測架構操作,如毫米(mm)行程需3 μm精度的量測,可選用單聚焦搭配單面高反射鍍層雷射二極體架構;若行程約40 μm,精度1 μm的量測,可考慮雙聚焦架構;若行程在10 μm以內,精度需求25 nm以內,需考慮雙聚焦搭配單面高反射鍍層雷射二極體架構。
英文摘要 The following research presents a study of an adaptive laser displacement sensor utilizing dispersive wavelength filter. Utilizing commercially available semiconductor gain chip and aspheric lenses, a widely tunable displacement sensor was built. Compared to traditional approach, the displacement sensor in our study featured less components and high dynamic range. The experimental approach could also be applied to optical scanning microscopy with adaptive sensitivity from nanometers to microns, large angled-surface tolerance, and only two-dimensional scan. Here in this investigation we demonstrate experimental results of our displacement sensor operated under middle range, which means a reliable sensitivity of three microns in four millimeters detecting range. Moreover, we present demonstration and analysis of an industrialized design of spatially dispersive displacement sensor, which is composed of an AlGaInP gain chip in visible range, optical assembly, and a spectrum analyzer. The sensor utilizes the spatial dispersion of focus from the optical assembly and wavelength spectrum’s deviation induced by the displacement of the target. As a result, the sensor delivers a quick and simple way in measuring displacement. By adapting the magnification and resolution of the optical assembly, a displacement sensor with middle measurement range, about 10 m, was obtained. However, we should note that 25-nm-resolution is limited by the bandwidth and temperature fluctuation of the gain chip.
論文目次 中文摘要 .................................................I
英文摘要..................................................Ⅱ
誌謝......................................................Ⅲ
目錄......................................................Ⅳ
表目錄....................................................Ⅵ
圖目錄....................................................Ⅶ
第1章 緒論............................................ ....1
1-1位移感測器..............................................1
1-2技術原理簡介............................................2
第2章色散特性對位移感測之模型研究.........................16
2-1簡介...................................................16
2-2幾何光學色散...........................................16
2-3外腔式雷射二極體共振...................................18
2-4簡單小信號近似模型.....................................25
第3章系統架構之研究.......................................35
3-1系統組件...............................................35
3-2平行光架構之位移感測及效果驗證.........................38
3-3雙聚焦架構之位移感測及效果驗證.........................40
3-4單聚焦架構之位移感測及效果驗證.........................42
3-5單聚焦搭配單面高反射鍍層雷射二極體位移感測架構及效果驗證........................................................44
第4章 InP雷射二極體色散位移感測...........................70
4-1系統設計與模擬.........................................70
4-2實驗結果與討論.........................................72
4-3結論...................................................73
第5章AlGaInP雷射二極體色散位移分析........................80
5-1系統架構與設計.........................................80
5-2模擬...................................................80
5-3實驗結果與分析.........................................81
第6章 總結與展望..........................................90
參考文獻..................................................92
著作目錄..................................................99
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