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系統識別號 U0026-0807202016064900
論文名稱(中文) 製備矽奈米線提高抗反射率應用於AZOY/n-Si太陽能電池之研究
論文名稱(英文) Fabrication of Silicon Nanowires to Improve Anti-reflectivity Applied to AZOY/n-Si Solar Cells
校院名稱 成功大學
系所名稱(中) 微電子工程研究所
系所名稱(英) Institute of Microelectronics
學年度 108
學期 2
出版年 109
研究生(中文) 謝尚儒
研究生(英文) Shang-Ju Hsieh
學號 Q16071136
學位類別 碩士
語文別 中文
論文頁數 81頁
口試委員 指導教授-洪茂峰
共同指導教授-王納富
口試委員-王永和
口試委員-周德威
口試委員-蔡有仁
中文關鍵字 金屬輔助化學蝕刻  矽奈米線  叉指背接觸式太陽能電池 
英文關鍵字 MAC etching  Si nanowires  IBC solar cells 
學科別分類
中文摘要 本研究透過低成本的濕式刻蝕以及製備大面積金屬輔助化學刻蝕(MAC刻蝕)的方法,這是一種用於製造矽奈米線陣列(Si NWs)的無電刻蝕方法。此方法分為兩步驟,將其分為沈積和蝕刻部分,並討論了沉積和蝕刻時間對Si NWs反射率的影響。 我們已經成功地將平均反射率(300-1100nm)降低到0.838%,大約是裸矽的46倍。該方法可以增加光的捕獲並降低短波長反射率,從而可以提高Jsc並提高效率。
在叉指背接觸式結構中,本篇使用快速且成本低的金屬遮罩進行微影來定義圖案,並探討不同曝光、顯影時間下,得到最佳的光阻參數,並討論此手法的相關困境,如對準問題、遮罩設計及量測手法,本篇都將一一探索分析來提升叉指背接觸式(IBC)太陽能電池Jsc並提高效率。
英文摘要 In this study, low-cost wet etching and preparation of large-area metal-assisted chemical etching (MAC etching) are used. This is an electroless etching method for manufacturing silicon nanowire arrays (Si NWs). We used the two-pot method to divide it into deposition and etching parts, and discussed the effects of deposition and etching time on the reflectivity of Si NWs. We have successfully reduced the average reflectivity (300-1100nm) to 0.838%, which is about 46 times that of bare silicon. This method can increase light capture and reduce short-wavelength reflectivity, which can improve Jsc and improve efficiency.
In the interdigitated back contact (IBC) structure, this article uses a fast and low-cost metal mask for lithography to define the pattern, and discusses the optimal photoresist parameters under different exposure and development times. And discuss the difficulties of this technique, such as alignment problems, mask design and measurement techniques, this article will explore and analyze one by one to improve the interdigital back contact (IBC) solar cell Jsc and improve efficiency.
論文目次 第一章 緒論 1
1-1 前言 1
1-2 太陽能電池簡介 1
1-3 矽奈米線 7
1-4 研究動機 9
第二章 理論基礎與文獻探討 11
2-1 矽奈米線 11
2-2 AZOY薄膜製備 15
2-3 叉指圖形轉移 20
2-4 半導體物理與元件 22
第三章 實驗方法與儀器介紹 33
3-1 實驗流程 33
3-2 實驗藥品及參數介紹 37
3-3 實驗儀器介紹 41
第四章 結果與討論 50
4-1 實驗架構 50
4-2 矽奈米線調變 51
4-3 叉指圖案轉移 59
4-4 遮罩設計參數調變 63
4-5 矽奈米線叉指式背電極太陽能電池分析 70
第五章 結論 73
第六章 未來展望 77
參考文獻 78
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