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系統識別號 U0026-0108201403053000
論文名稱(中文) 閘極介電層之極化效應對有機薄膜電晶體電特性的影響研究
論文名稱(英文) Gate dielectric polarization effects on the electrical characteristics of organic thin-film transistors
校院名稱 成功大學
系所名稱(中) 光電科學與工程學系
系所名稱(英) Department of Photonics
學年度 102
學期 2
出版年 103
研究生(中文) 周芳聖
研究生(英文) Fang-Sheng Chou
學號 l76014213
學位類別 碩士
語文別 中文
論文頁數 110頁
口試委員 指導教授-鄭弘隆
口試委員-周維揚
口試委員-唐富欽
口試委員-王右武
中文關鍵字 有機半導體  電晶體  極化效應  雙極性傳輸  界面缺陷 
英文關鍵字 organic semiconductor  transistors  dipole effect  ambipolar characteristic  interface trap 
學科別分類
中文摘要 本論文研究介電層的偶極極化效應對有機薄膜電晶體的電特性影響,實驗分為兩部分,實驗第一部分主要探討偶極對雙極性有機薄膜電晶體的電特性影響,第二部分聚焦於偶極對單極性有機薄膜電晶體的電特性影響。
第一部分以五苯環素 (Pentacene) 做為雙極性有機薄膜電晶體之主動層,探討介電層中加入具有鐵電性質的聚二氟乙烯 (Polyvinylidene fluoride,PVDF) 極化層後,偶極極化效應對元件電特性的影響,實驗結果指出,PVDF 極化層被聚甲基丙烯酸甲酯 (Polymethylmethacrylate,PMMA) 覆蓋之複合介電層,能提升元件在 N 型操作時的輸出電流並降低臨界電壓。當 PVDF 的偶極極化效應經電場極化達最大化後,電流增益的效果與載子遷移率可大幅提升,電子與電洞的載子遷移率達 2 cm2/Vs 以上,使元件在 N 型操作及 P 型操作下有更匹配的載子遷移率與輸出電流。雖然 PVDF 的偶極極化效應無法提升元件在 P 型操作時的輸出電流與載子遷移率,但導納分析及同步施加電場的方式 (in-situ) 量測拉曼光譜的結果顯示,PVDF 的偶極極化效應可使主動層經電場應力後,仍然可以維持良好的結構均勻性,也可降低主動層與介電層間的缺陷態密度,因此元件操作時有更好的穩定性。另外,PVDF 偶極電場可加速半導體層中電子電洞對的分離過程,使主動層與介電層間界面的缺陷鬆弛時間減少約一半。由 X-ray 繞射 (X-ray diffraction,XRD) 與原子力顯微鏡 (Atomic force microscope,AFM) 的觀測結果發現介電層表面粗糙度與半導體層結晶並非影響載子傳輸的主要因素,更加凸顯 PVDF 的偶極極化效應對元件電特性表現所造成的影響。
第二部分探討 PVDF 的偶極極化效應對以駢苯衍生物 (Perylene diimide derivative,PTCDI) 為主動層之單極性有機薄膜電晶體的電特性影響,實驗結果顯示,PVDF 的偶極極化效應雖然有助於載子通道提早形成,降低元件的臨界電壓,但載子受到偶極電場的束縛而降低了閘極的控制能力,也造成半導體與介電層界面有較大的缺陷態密度且載子受缺陷態侷限的時間較長。我們也發現元件特性受 PVDF 的偶極極化效應影響程度與 PTCDI 的碳鏈長度有關,PTCDI 的碳鏈長度增加會屏蔽 PVDF 的偶極極化效應。
英文摘要 This study investigated the electrical characteristics of organic field-effect transistors (OFETs) influenced by the gate dielectric polarization effect (dipole effect). In the first part, pentacene-based ambipolar OFETs with a polyvinylidene fluoride (PVDF) polarization layer were explored. The dipole effect significantly increased the drain current and reduced the threshold voltage of the devices because of the internal electric field. An external electric field maximized the dipole effect and balanced the saturated mobility in both the electron and the hole. The saturated mobility in both electron and hole was over 2 cm2/Vs. The dipole effect reduced the interfacial trap density (Dit) and the trap/de-trap time (τit) on the dielectric/semiconductor interface and enhanced the stability of the devices with PVDF polarization layers. In the second part, perylene diimide derivative (PTCDI) -based unipolar OFETs with PVDF polarization layers were explored. Although the dipole effect contributed to the reduction of the threshold voltage, it decreased the gate control ability and increased the subthreshold swing of the devices. The carriers were bound by the dipole field, resulting in a large Dit and τit on the dielectric/semiconductor interface.
論文目次 中文摘要 I
Abstract III
致謝 IX
目錄 XI
第一章 緒論 1
1-1 有機半導體簡介 1
1-2 有機薄膜電晶體概論 2
1-2.1 有機薄膜電晶體基本架構 2
1-2.2 單極性/雙極性傳輸性質 3
1-2.3 元件操作原理與基本電特性 4
1-2.4 雙極性有機薄膜電晶體操作原理 6
1-3 研究動機 7
第二章 元件製程與分析工具 13
2-1 實驗材料 13
2-1.1 有機半導體材料 13
2-2.2 基板、高分子修飾層與極化層材料 13
2-3 有機薄膜電晶體製程 14
2-3.1 基板清洗 14
2-3.2 旋轉塗佈修飾層與極化層 14
2-3.3 成長有機半導體與金屬電極 14
2-4 實驗分析儀器 15
2-4.1 元件電性分析 15
2-4.2 介電層表面性質分析 15
2-4.3 半導體層結構分析 16
第三章 聚氟化二乙烯極化層對五苯環素薄膜電晶體之雙極性傳輸性質影響 18
3-1 前言 18
3-2 實驗方法 19
3-3 雙極性有機薄膜電晶體之電特性分析 20
3-3.1 介電層結構效應 20
3-3.2 聚氟化二乙烯的分子量影響 22
3-3.3 最大化極化層偶極極化效應 23
3-3.4 聚氟化二乙烯的濃度影響 27
3-4 電容-電壓與導納分析 28
3-5 薄膜特性分析 31
3-5.1 介電層表面極性與張力分析 31
3-5.2 介電層表面粗糙度與主動層結晶性分析 33
3-5.3 表面電位分析 34
3-5.4 拉曼光譜分析 35
3-6 綜合討論 36
第四章 聚氟化二乙烯對駢苯衍生物單極性薄膜電晶體的電特性影響 86
4-1 前言 86
4-2 實驗方法 87
4-3 駢本衍生物之碳鏈長度與極化效應的關係 87
4-4 電容-電壓與導納分析 89
4-5 綜合討論 90
第五章 總結與未來展望 102
參考文獻 104
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